(19)
(11) EP 0 110 956 A1

(12)

(43) Date of publication:
20.06.1984 Bulletin 1984/25

(21) Application number: 83902037.0

(22) Date of filing: 13.05.1983
(51) International Patent Classification (IPC): 
H01L 21/ 033( . )
H01L 21/ 336( . )
H01L 21/ 225( . )
(86) International application number:
PCT/US1983/000731
(87) International publication number:
WO 1983/004342 (08.12.1983 Gazette 1983/28)
(84) Designated Contracting States:
DE FR NL

(30) Priority: 01.06.1982 US 19820383794

(71) Applicant: Western Electric Company, Incorporated
New York, NY 10038 (US)

(72) Inventors:
  • KINSBRON, Eliezer
    Highland Park, NJ 08904 (US)
  • LYNCH, William Thomas
    Summit, NJ 07901 (US)

(74) Representative: Watts, Christopher Malcolm Kelway, Dr., et al 
AT&T (UK) Ltd. 5, Mornington Road
Woodford Green Essex, IG8 0TU
Woodford Green Essex, IG8 0TU (GB)

   


(54) METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE