(19)
(11)
EP 0 110 956 A1
(12)
(43)
Date of publication:
20.06.1984
Bulletin 1984/25
(21)
Application number:
83902037.0
(22)
Date of filing:
13.05.1983
(51)
International Patent Classification (IPC):
H01L
21/
033
( . )
H01L
21/
336
( . )
H01L
21/
225
( . )
(86)
International application number:
PCT/US1983/000731
(87)
International publication number:
WO 1983/004342
(
08.12.1983
Gazette 1983/28)
(84)
Designated Contracting States:
DE FR NL
(30)
Priority:
01.06.1982
US 19820383794
(71)
Applicant:
Western Electric Company, Incorporated
New York, NY 10038 (US)
(72)
Inventors:
KINSBRON, Eliezer
Highland Park, NJ 08904 (US)
LYNCH, William Thomas
Summit, NJ 07901 (US)
(74)
Representative:
Watts, Christopher Malcolm Kelway, Dr., et al
AT&T (UK) Ltd. 5, Mornington Road
Woodford Green Essex, IG8 0TU
Woodford Green Essex, IG8 0TU (GB)
(54)
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE