(19)
(11) EP 0 112 491 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
16.09.1987 Bulletin 1987/38

(43) Date of publication A2:
04.07.1984 Bulletin 1984/27

(21) Application number: 83111571

(22) Date of filing: 19.11.1983
(84) Designated Contracting States:
BE CH DE FR GB IT LI

(30) Priority: 27.11.1982 JP 20688982

(71) Applicant: Nohmi Bosai Kogyo Co., Ltd.
 ()

(72) Inventor:
  • Kimura, Shoichi c/o NOHMI BOSAI KOGYO CO., LTD.
     ()

   


(54) Alarm and control system for semiconductor manufacturing plants


(57) This invention relates to an alarm and control system which detects leak of processing gas or a fire occurring in manufacturing process in very large-scale integrated circuit manufacturing plants, and adequately controls fire protection system such as fire extinguishing system and the manufacturing process.






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