(19)
(11) EP 0 112 492 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
26.08.1987 Bulletin 1987/35

(43) Date of publication A2:
04.07.1984 Bulletin 1984/27

(21) Application number: 83111572

(22) Date of filing: 19.11.1983
(84) Designated Contracting States:
BE CH DE FR GB IT LI

(30) Priority: 27.11.1982 JP 20688882

(71) Applicant: Nohmi Bosai Kogyo Co., Ltd.
 ()

(72) Inventor:
  • Kimura, Shoichi c/o NOHMI BOSAI KOGYO CO., LTD.
     ()

   


(54) Alarm and control system for semiconductor manufacturing plants


(57) This invention relates to an alarm and control system for semiconductor manufacturing plants which is capable of detecting the leaking processing gas both in gaseous state and in a state that it is generating combustion products as a result of its reaction with oxigen in air and combustion, and of performing adequate controls before or in incipient stage of fire.






Search report