(57) A liquid metal ion source has a carrier strip 3 which melts and holds a substance
5 being ionized, a needle anode 1 located so that its pointed tip projects the ions
of the molten substance supplied by the carrier strip, and a draw-out electrode 7
to apply a strong electric field between itself and the anode, thereby drawing out
the ions from the pointed tip of the anode. The ion source has a thermal stress-absorbing
element 10 installed between the needle anode and its support 2, or a plurality of
such members between the carrier strip and its supports, to take up the thermal stresses
that would result from the difference in thermal expansion coefficients between the
needle anode and the carrier strip when both are secured to their supports, and which
would damage the connected components.
|
|
