(19)

(11)

EP 0 114 851 A1

(12)

(43) Date of publication: 08.08.1984 Bulletin 1984/32 (21) Application number: 83902274.0 (22) Date of filing: 04.03.1983

(51) International Patent Classification (IPC):  B05D 1/ 18( . ) B05D 1/ 20( . ) H01L 21/ 312( . ) H01L 29/ 78( . ) H01L 29/ 94( . ) H01L 51/ 00( . ) H01L 51/ 05( . ) B05D 1/ 00( . ) H01L 21/ 28( . ) H01L 29/ 51( . ) H01L 29/ 861( . ) H01L 39/ 22( . ) H01L 51/ 30( . ) (86) International application number: PCT/GB1983/000065 (87) International publication number: WO 1983/003165 (15.09.1983 Gazette 1983/21)

(84) Designated Contracting States: DE FR (30) Priority: 05.03.1982 GB 19820006563 (71) Applicant: NATIONAL RESEARCH DEVELOPMENT CORPORATION London SE1 6BU (GB)	(72) Inventors: WINTER, Christopher Simon Lancaster (GB) TREDGOLD, Richard Harfield Brookhouse Lancaster LA2 9PJ (GB) (74) Representative: Colmer, Stephen Gary  Patent Department National Research Development Corporation 101 Newington Causeway London SE1 6BU London SE1 6BU (GB)