(19)

(11)

EP 0 114 881 A1

(12)

(43) Date of publication: 08.08.1984 Bulletin 1984/32 (21) Application number: 83902613.0 (22) Date of filing: 22.07.1983

(51) International Patent Classification (IPC):  B01J 19/ 08( . ) B05D 3/ 06( . ) B01J 19/ 12( . ) G03F 7/ 20( . ) (86) International application number: PCT/US1983/001126 (87) International publication number: WO 1984/000506 (16.02.1984 Gazette 1984/05)

(84) Designated Contracting States: BE CH DE FR GB LI NL (30) Priority: 23.07.1982 US 19820401318 03.05.1983 US 19830491016 12.05.1983 US 19830493779 (71) Applicant: XENON CORPORATION Wilmington, MA 01887 (US)	(72) Inventor: PANICO, C., Richard Medford, MA 02155 (US) (74) Representative: Deans, Michael John Percy, et al  Lloyd Wise, Tregear & CO. Norman House 105-109 Strand London WC2R OAE London WC2R OAE (GB)