(19)
(11)
EP 0 116 633 A1
(12)
(43)
Date of publication:
29.08.1984
Bulletin 1984/35
(21)
Application number:
83902933.0
(22)
Date of filing:
18.08.1983
(51)
International Patent Classification (IPC):
G01B
7/
28
( . )
G01B
7/
34
( . )
(86)
International application number:
PCT/US1983/001279
(87)
International publication number:
WO 1984/000809
(
01.03.1984
Gazette 1984/06)
(84)
Designated Contracting States:
CH DE FR GB LI
(30)
Priority:
19.08.1982
US 19820409434
(71)
Applicant:
AIT CORP.
West Boylston, MA (US)
(72)
Inventors:
ACKERMAN, Gary, M.
Worcester, MA (US)
EDGINGTON, Nicholas
Worcester, MA (US)
(54)
A PROBE FOR DISPLAYING SURFACE DEVIATIONS