(19)
(11) EP 0 116 633 A1

(12)

(43) Date of publication:
29.08.1984 Bulletin 1984/35

(21) Application number: 83902933.0

(22) Date of filing: 18.08.1983
(51) International Patent Classification (IPC): 
G01B 7/ 28( . )
G01B 7/ 34( . )
(86) International application number:
PCT/US1983/001279
(87) International publication number:
WO 1984/000809 (01.03.1984 Gazette 1984/06)
(84) Designated Contracting States:
CH DE FR GB LI

(30) Priority: 19.08.1982 US 19820409434

(71) Applicant: AIT CORP.
West Boylston, MA (US)

(72) Inventors:
  • ACKERMAN, Gary, M.
    Worcester, MA (US)
  • EDGINGTON, Nicholas
    Worcester, MA (US)

   


(54) A PROBE FOR DISPLAYING SURFACE DEVIATIONS