(19)
(11) EP 0 118 553 A1

(12)

(43) Date of publication:
19.09.1984 Bulletin 1984/38

(21) Application number: 83903072.0

(22) Date of filing: 08.09.1983
(51) International Patent Classification (IPC): 
H01L 21/ 768( . )
 H01L 23/ 48( . )
(86) International application number:
PCT/US1983/001389
(87) International publication number:
WO 1984/001240 (29.03.1984 Gazette 1984/09)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 13.09.1982 US 19820417276

(71) Applicant: Hughes Aircraft Company
Los Angeles, California 90045-0066 (US)

(72) Inventors:
  • GATES, James, L.
    Vista, CA 92083 (US)
  • GAALEMA, Steven, D.
    Carlsbad, CA 92008 (US)

   


(54) FEEDTHROUGH STRUCTURE FOR THREE DIMENSIONAL MICROELECTRONIC DEVICES