AUTOMATIC SEMICONDUCTOR SURFACE INSPECTION APPARATUS AND METHOD - Patent 0119198

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EP 0 119 198 A1

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(43)	Date of publication:
	26.09.1984 Bulletin 1984/39

(21)	Application number: 82903370.0

(22)	Date of filing: 20.09.1982

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International Patent Classification (IPC):

G01B 11/ 24^{( . )}
G01N 21/ 93^{( . )}
G06T 7/ 00^{( . )}

G01N 21/ 88^{( . )}
G01N 21/ 956^{( . )}
H01L 21/ 66^{( . )}

(86)	International application number:
	PCT/US1982/001277

(87)	International publication number:
	WO 1984/001212 (29.03.1984 Gazette 1984/09)

(84)	Designated Contracting States:
	CH DE FR GB LI

(71)	Applicant: CONTREX INC.
	Burlington MA 01803 (US)

(72)	Inventors:
	BRAUNER, Raul, A. Framingham, MA 01701 (US) ESRIG, Paul Framingham, MA 01701 (US) LIFF, Harold Lexington, MA 02173 (US) ULLMAN, Shimon Brookline, MA 02146 (US)

(74)	Representative: Blatchford, William Michael, et al
	Withers & Rogers 4 Dyer's Buildings Holborn London EC1N 2JT London EC1N 2JT (GB)

(54)	AUTOMATIC SEMICONDUCTOR SURFACE INSPECTION APPARATUS AND METHOD