(19)

(11)

EP 0 120 089 A1

(12)

(43) Date of publication: 03.10.1984 Bulletin 1984/40 (21) Application number: 83903641.0 (22) Date of filing: 27.09.1983

(51) International Patent Classification (IPC):  G03F 7/ 20( . ) H01L 21/ 027( . ) H01L 27/ 02( . ) H01J 37/ 317( . ) H01L 21/ 82( . ) (86) International application number: PCT/US1983/001541 (87) International publication number: WO 1984/001454 (12.04.1984 Gazette 1984/10)

(84) Designated Contracting States: DE FR GB (30) Priority: 30.09.1982 US 19820430096 (71) Applicant: STORAGE TECHNOLOGY PARTNERS Santa Clara CA 95051 (US)	(72) Inventor: ZASIO, John, J. Sunnyvale, CA 94087 (US) (74) Representative: UEXKÜLL & STOLBERG  Patentanwälte Beselerstrasse 4 D-22607 Hamburg D-22607 Hamburg (DE)