(19)
(11) EP 0 121 707 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
09.10.1985 Bulletin 1985/41

(43) Date of publication A2:
17.10.1984 Bulletin 1984/42

(21) Application number: 84101834

(22) Date of filing: 22.02.1984
(84) Designated Contracting States:
DE FR GB

(30) Priority: 10.03.1983 US 474120

(71) Applicant: International Business Machines Corporation
 ()

(72) Inventors:
  • Basi, Jagtar Singh
     ()
  • Mendel, Eric
     ()

   


(54) Method for polishing amorphous aluminum oxide


(57) The method comprises the chemical-mechanical polishing of amorphous aluminum oxide surfaces to a high degree of perfection. The aluminum oxide surfaces are continuously wetted with a water-citric acid slurry containing a soft abrasive material. The continuously wiping of the aluminum oxide surface is accomplished with a firm surface (16) using pressure while maintaining a relative movement between the aluminum oxide surface and the firm surface (16) to remove the water reacted aluminum oxide product from the high points of the aluminum oxide surface. This method is continued until a high degree of perfection of the surface is accomplished. The slurry is typically composed of colloidal silicon dioxide dispersed in water containing citric acid.






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