(19) |
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(11) |
EP 0 126 909 A3 |
(12) |
EUROPEAN PATENT APPLICATION |
(88) |
Date of publication A3: |
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23.01.1985 Bulletin 1985/04 |
(43) |
Date of publication A2: |
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05.12.1984 Bulletin 1984/49 |
(22) |
Date of filing: 04.04.1984 |
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(84) |
Designated Contracting States: |
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CH DE FR GB IT LI NL |
(30) |
Priority: |
04.04.1983 US 481783
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(71) |
Applicant: HELIX TECHNOLOGY CORPORATION |
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() |
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(72) |
Inventors: |
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- Eacobacci, Michael J.
()
- Olsen, Donald A.
()
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(54) |
Cryopump with rapid cooldown and increased pressure stability |
(57) In a cryopump, condensation of gases such as argon, oxygen and nitrogen on surfaces
other than the second stage array 38, 40 is avoided to prevent cross over hang up
and pressure instability. To prevent condensation of argon, oxygen and nitrogen on
the frontal cryopumping array 46, that array is held to a temperature of at least
50 K. A heat load to the first stage increases as the temperature of the first stage
drops. That heat load is provided by a high emissivity radiation shield 44 or by a
thermal switch 56, 58. Condensation of argon and other gases on the second stage refrigerator
cylinder 32 is avoided by a close fitting sleeve 52 positioned over the refrigerator
cylinder 32 in thermal contact with the second stage heat sink 30 but out of thermal
contact with the cylinder 32.