(57) The process for forming a desired metal pattern on a substrate (35) comprises forming
a mask of a thermally depolymerizable polymer (40) on the substrate (35) with a pattern
of openings (70) complementary to the desired metal pattern, blanket coating the substrate
(35) and the mask (40) with a metal (60), heating the substrate (35) to depolymerize
the depolymerizable polymer (40), cooling the surface of the metal (60) to thereby
delaminate the metal coated in areas where thermally depolymerizable polymer (40)
is present, removing the delaminated metal where necessary, and optionally plasma
etching the depolymerized polymer, if residue thereof remains, to remove the same
from said substrate.
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