(19)
(11) EP 0 144 338 A1

(12)

(43) Date of publication:
19.06.1985 Bulletin 1985/25

(21) Application number: 84901488.0

(22) Date of filing: 05.03.1984
(51) International Patent Classification (IPC): 
G01J 3/ 45( . )
G01J 3/ 453( . )
(86) International application number:
PCT/US1984/000361
(87) International publication number:
WO 1984/003560 (13.09.1984 Gazette 1984/22)
(84) Designated Contracting States:
AT BE CH DE FR GB LI LU NL SE

(30) Priority: 07.03.1983 US 19830472771

(71) Applicant: BECKMAN INSTRUMENTS, INC.
Fullerton California 92634 (US)

(72) Inventors:
  • WIJNTJES, Geert
    Belmont, MA 02178 (US)
  • HERCHER, Michael
    Marblehead, MA 01945 (US)

(74) Representative: Wotherspoon, Graham, et al 
FITZPATRICKS 4 West Regent Street
Glasgow G2 1RS Scotland
Glasgow G2 1RS Scotland (GB)

   


(54) DYNAMIC MIRROR ALIGNMENT CONTROL