(19)
(11)
EP 0 144 338 A1
(12)
(43)
Date of publication:
19.06.1985
Bulletin 1985/25
(21)
Application number:
84901488.0
(22)
Date of filing:
05.03.1984
(51)
International Patent Classification (IPC):
G01J
3/
45
( . )
G01J
3/
453
( . )
(86)
International application number:
PCT/US1984/000361
(87)
International publication number:
WO 1984/003560
(
13.09.1984
Gazette 1984/22)
(84)
Designated Contracting States:
AT BE CH DE FR GB LI LU NL SE
(30)
Priority:
07.03.1983
US 19830472771
(71)
Applicant:
BECKMAN INSTRUMENTS, INC.
Fullerton California 92634 (US)
(72)
Inventors:
WIJNTJES, Geert
Belmont, MA 02178 (US)
HERCHER, Michael
Marblehead, MA 01945 (US)
(74)
Representative:
Wotherspoon, Graham, et al
FITZPATRICKS 4 West Regent Street
Glasgow G2 1RS Scotland
Glasgow G2 1RS Scotland (GB)
(54)
DYNAMIC MIRROR ALIGNMENT CONTROL