(19)
(11) EP 0 146 625 A1

(12)

(43) Date of publication:
03.07.1985 Bulletin 1985/27

(21) Application number: 84903107.0

(22) Date of filing: 18.05.1984
(51) International Patent Classification (IPC): 
H01L 21/ 302( . )
H01L 21/ 318( . )
H01L 29/ 423( . )
H01L 29/ 80( . )
H01L 21/ 265( . )
H01L 21/ 338( . )
H01L 29/ 47( . )
H01L 29/ 812( . )
(86) International application number:
PCT/US1984/000759
(87) International publication number:
WO 1985/000077 (03.01.1985 Gazette 1985/01)
(84) Designated Contracting States:
DE FR GB NL

(30) Priority: 17.06.1983 US 19830505148

(71) Applicant: Hughes Aircraft Company
Los Angeles, California 90045-0066 (US)

(72) Inventors:
  • LEE, Robert, E.
    Thousand Oaks, CA 91360 (US)
  • LEVY, Harold, M.
    Tarzana, CA 91356 (US)

(74) Representative: Colgan, Stephen James, et al 
CARPMAELS & RANSFORD 43 Bloomsbury Square
London WC1A 2RA
London WC1A 2RA (GB)

   


(54) SELF-ALIGNED GATE MESFET AND THE METHOD OF FABRICATING SAME