(19)
(11)
EP 0 146 625 A1
(12)
(43)
Date of publication:
03.07.1985
Bulletin 1985/27
(21)
Application number:
84903107.0
(22)
Date of filing:
18.05.1984
(51)
International Patent Classification (IPC):
H01L
21/
302
( . )
H01L
21/
318
( . )
H01L
29/
423
( . )
H01L
29/
80
( . )
H01L
21/
265
( . )
H01L
21/
338
( . )
H01L
29/
47
( . )
H01L
29/
812
( . )
(86)
International application number:
PCT/US1984/000759
(87)
International publication number:
WO 1985/000077
(
03.01.1985
Gazette 1985/01)
(84)
Designated Contracting States:
DE FR GB NL
(30)
Priority:
17.06.1983
US 19830505148
(71)
Applicant:
Hughes Aircraft Company
Los Angeles, California 90045-0066 (US)
(72)
Inventors:
LEE, Robert, E.
Thousand Oaks, CA 91360 (US)
LEVY, Harold, M.
Tarzana, CA 91356 (US)
(74)
Representative:
Colgan, Stephen James, et al
CARPMAELS & RANSFORD 43 Bloomsbury Square
London WC1A 2RA
London WC1A 2RA (GB)
(54)
SELF-ALIGNED GATE MESFET AND THE METHOD OF FABRICATING SAME