(19)

(11)

EP 0 152 471 A1

(12)

(43) Date of publication: 28.08.1985 Bulletin 1985/35 (21) Application number: 84903235.0 (22) Date of filing: 15.08.1984

(51) International Patent Classification (IPC):  C23C 12/ 00( . ) F01D 5/ 28( . ) C23C 12/ 02( . ) (86) International application number: PCT/US1984/001289 (87) International publication number: WO 1985/000837 (28.02.1985 Gazette 1985/05)

(84) Designated Contracting States: AT CH DE FR GB LI NL SE (30) Priority: 15.08.1983 US 19830523659 07.03.1984 US 19840587172 (71) Applicants: CLARK, Eugene V. Northridge, CA 91324 (US) SIEVERS, George Kelly Burbank, CA 91506 (US)	(72) Inventors: CLARK, Eugene V. Northridge, CA 91324 (US) SIEVERS, George Kelly Burbank, CA 91506 (US) (74) Representative: Schulze, Ilse, et al  Patenanwältin Bergstrasse 49 D-69120 Heidelberg D-69120 Heidelberg (DE)