(19)

(11)

EP 0 155 965 A1

(12)

(43) Date of publication: 02.10.1985 Bulletin 1985/40 (21) Application number: 85900508.0 (22) Date of filing: 12.09.1984

(51) International Patent Classification (IPC):  H01L 21/ 60( . ) H01L 23/ 14( . ) H01L 23/ 58( . ) H01L 21/ 66( . ) H01L 23/ 538( . ) H01L 25/ 16( . ) (86) International application number: PCT/US1984/001444 (87) International publication number: WO 1985/001390 (28.03.1985 Gazette 1985/08)

(84) Designated Contracting States: BE DE FR GB NL (30) Priority: 15.09.1983 US 19830532391 (71) Applicant: MOSAIC SYSTEMS, INC. Troy, MI 48084 (US)	(72) Inventors: STOPPER, Herbert Orchard Lake, MI 48033 (US) PERKINS, Cornelius, Churchill Birmingham, MI 48009 (US) (74) Representative: Kirby, Harold Douglas Benson, et al  G.F. Redfern & Company Marlborough Lodge 14 Farncombe Road Worthing West Sussex BN11 2BT Worthing West Sussex BN11 2BT (GB)