(19)

(11)

EP 0 162 111 A1

(12)

(43) Date of publication: 27.11.1985 Bulletin 1985/48 (21) Application number: 85900326.0 (22) Date of filing: 20.11.1984

(51) International Patent Classification (IPC):  C23C 16/ 46( . ) C23C 16/ 48( . ) (86) International application number: PCT/US1984/001928 (87) International publication number: WO 1985/002417 (06.06.1985 Gazette 1985/13)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 23.11.1983 US 19830554489 (71) Applicant: GEMINI RESEARCH, INC. Fremont, CA 94538 (US)	(72) Inventors: McDIARMID, James San Jose, CA 95132 (US) HAMMOND, Martin, L. Cupertino, CA 95014 (US) PFEFFERKORN, Glenn, A. San Jose, CA 95127 (US) (74) Representative: Wright, Hugh Ronald, et al  Brookes & Martin 52/54 High Holborn London WC1V 6SE London WC1V 6SE (GB)