(19)
(11) EP 0 162 842 A1

(12)

(43) Date of publication:
04.12.1985 Bulletin 1985/49

(21) Application number: 84900219.0

(22) Date of filing: 01.12.1983
(51) International Patent Classification (IPC): 
C23C 14/ 00( . )
H01J 37/ 34( . )
(86) International application number:
PCT/US1983/001883
(87) International publication number:
WO 1985/002418 (06.06.1985 Gazette 1985/13)
(84) Designated Contracting States:
AT BE CH DE FR GB LI LU NL SE

(71) Applicant: SHATTERPROOF GLASS CORPORATION
Detroit, MI 48210 (US)

(72) Inventor:
  • ROBINSON, Merrill, G.
    Ann Arbor, MI 48103 (US)

   


(54) GAS DISTRIBUTION SYSTEM FOR SPUTTERING CATHODES