(19)
(11)
EP 0 162 842 A1
(12)
(43)
Date of publication:
04.12.1985
Bulletin 1985/49
(21)
Application number:
84900219.0
(22)
Date of filing:
01.12.1983
(51)
International Patent Classification (IPC):
C23C
14/
00
( . )
H01J
37/
34
( . )
(86)
International application number:
PCT/US1983/001883
(87)
International publication number:
WO 1985/002418
(
06.06.1985
Gazette 1985/13)
(84)
Designated Contracting States:
AT BE CH DE FR GB LI LU NL SE
(71)
Applicant:
SHATTERPROOF GLASS CORPORATION
Detroit, MI 48210 (US)
(72)
Inventor:
ROBINSON, Merrill, G.
Ann Arbor, MI 48103 (US)
(54)
GAS DISTRIBUTION SYSTEM FOR SPUTTERING CATHODES