(19)

(11)

EP 0 167 589 A1

(12)

(43) Date of publication: 15.01.1986 Bulletin 1986/03 (21) Application number: 85900535.0 (22) Date of filing: 14.12.1984

(51) International Patent Classification (IPC):  H01L 21/ 288( . ) C23C 28/ 00( . ) H01L 31/ 04( . ) C23C 18/ 31( . ) H01L 31/ 0224( . ) H01L 31/ 18( . ) (86) International application number: PCT/US1984/002065 (87) International publication number: WO 1985/002939 (04.07.1985 Gazette 1985/15)

(84) Designated Contracting States: FR (30) Priority: 19.12.1983 US 19830563061 10.10.1984 US 19840659279 13.12.1984 US 19840681003 (71) Applicant: MOBIL SOLAR ENERGY CORPORATION Billerica, Massachusetts 01821 (US)	(72) Inventor: YATES, Douglas, A. Burlington, MA 01803 (US) (74) Representative: Chameroy, Claude, et al  c/o Cabinet Malemont 42, avenue du Président Wilson F-75116 Paris F-75116 Paris (FR)