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(11) | EP 0 168 270 B1 |
| (12) | EUROPEAN PATENT SPECIFICATION |
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Device for analyzing and correcting wavefront surfaces in real time Vorrichtung zur Echtzeit-Untersuchung und Korrektur von Wellenflächen Dispositif pour l'analyse et la correction de surfaces d'ondes en temps réel |
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| Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention). |
[0001] The present invention relates, generally speaking, to the analysis and correction of wave surfaces in real time and, more particularly, to an interferometer with shearing or lateral duplication that serves in measuring the phase distortion of a wave-front.
[0002] Wave surfaces analysis means measurement of the phase differences in the wave delivered by an optical system or instrument with respect to a reference wave surface that would have resulted from the same optical system if assumed to be perfect and unaffected by the atmospheric turbulence.
[0003] The wave can be adversely affected by aberrations in the instrument (e.g. in the case of a very large mirror becoming deformed under the effect of various stresses, or a mosaic system made up of multiple mirrors) or by phenomena related to atmospheric propagation (turbulence, thermal defocalization).
[0004] The advantage of wavefront analysis in real time is to be able to apply a correction instantaneously to the wave surface using a deformable mirror or, more generally, an adaptive optical system, and thus to free the system of the aforesaid disturbances.
[0005] In the current state of the art, wavefront analysis and correction systems working in real time have two types of application both requiring very high spatial resolution (less than or equal to 100 prad): fine aiming for a laser beam and very long range imagery (astronomy, satellite observation). In these applicational fields, the apertures in question are approximately one meter in dimension and the adaptive optical arrangement makes it possible to reach a resolution limit dependent solely on diffraction and no longer on phase defects.
[0006] In high-power laser aiming systems based on what are called "return waves", use is made of a wave surface analyzer on the basis of which a deformable mirror is positioned in order to transmit a conjugate wave of the wave received and which focuses perfectly on the target.
[0007] As far as very long range optical imagery systems are concerned, it is possible with the wave surface analyzing device to detect phase distortions in the wave front falling on the entrance pupil into the optical system, and a deformable mirror is controlled by the analyzing device in order to correct the wave front for the distortions thus detected.
[0008] Optical systems are known especially through patent US-A-3923400 for forming the image of an object through the atmosphere, where such systems comprise a device working in real time for detecting and correcting the phase of the wavefront as seen by these optical systems, said device comprising:
-interferometry means based on shearing or lateral duplication receiving the disturbed wavefront, determining the relative phase differences in real time between the various regions in thus disturbed wavefront and producing signals representing the said phase differences;
-means responding to the said phase-difference signals for simultaneously producing, in parallel and in real time, signals representing phase corrections to be made to the various regions in the disturbed wavefront in order to obtain a corrected wavefront; and
-phase correcting means receiving the disturbed wavefront and responding to the phase correcting signals to modify the phase difference in real time between the various regions of the disturbed wave front and change the shape of this disturbed wave front to generate a corrected wave front.
[0009] The purpose of the lateral-duplication interferometer is to duplicate the wavefront to measure the phase difference between the two overlapping regions of the wavefront. To measure this phase difference, at the output from a detector placed in the interference plane, an interference signal is created with modulation thereof obtained by moving one of the portions of the lateral-duplication interferometer.
[0010] In the aforesaid patent, the lateral-shear interferometer is formed of an optical diffraction grating producing two cones in two slightly divergent angular directions with a common area of overlap. The wavefront is therefore duplicated and it is possible to measure the phase difference between two neighbouring areas of the wavefront. This is achieved by modulating the interference pattern and by detecting the relative phase of this interference pattern at various points therein. The use in the aforesaid patent of an interferometer with lateral shear and diffraction grating results in difficulties in tuning the interferometer due to the existence of different diffraction orders within a grating and the need for overlap between just two orders, only 0 and 1 or -1 and 0.
[0011] The diffraction gratings in the prior art are moved either in translation or in rotation (cf. "Radial Grating Shear Heterodyne Interferometer", by Chris L. Koliopoulus, Applied Optics, May 1, 1980, vol. 19, No. 9, pages 1523 and sq.) for modulating the interference pattern. The interference in higher orders gives rise to frequency modulations that are multiples of the basic modulation frequency that must be filtered.
[0012] At a point in the interference plane, the interference is observed after filtering between the points M(x) and M(x+Δx) and between M(x) and M(xΔx). An exact calculation shows that the phases of these two modulations are identical if the phase shifts
and
are identical, i.e. if the wave is locally planar, which is something of a hindrance.
[0013] In accordance with the invention, the lateral-duplication interferometer incorporates offset dihedrons. The shift in the wavefront stems from the offset of one of the dihedrons. At each point in the interference plane, only two points of the wavefront interfere. The interference pattern modulation is achieved by causing saw-tooth oscillation in one of the dihedrons, whereat the oscillation amplitude is preferably V4.
[0014] The wavefront analysis system embodying the invention does not carry any higher diffraction orders and causes interference between just two waves. The interference pattern is simplified and the optical efficiency improved. There is no need to suppose that the wave is locally planar. Whatever its shape, the only parameter that is measured is
The lateral offset is easy to set.
[0015] The invention will now be described in detail in relation to the appended drawings, in which:
Fig. 1 is an optical diagram of a wave surface analyzing and correcting device as in the prior art;
Fig. 2 represents the dihedral interferometer embodying the invention;
Fig. 3 represents this dihedral interferometer more precisely with a single analysis beam running therethrough;
Fig. 4 represents an example of the actuator positions in the pupil plane; and
Fig. 5 represents an example corresponding to Figure 4 showing the position of the photodetectors both for duplication along x and duplication along y.
[0016] With reference to Figure 1 that recaps on the prior art, depicted is an objective lens 10 on the entrance pupil into a telescopic optical. system where said lens delivers an un-corrected image of a distant object in the focal plane 11 of the optical system. This image can be severely distorted as a result of random phase inversions and phase shifts in the wavefront due to atmospheric turbulence or aberrations in the optical system.
[0017] In Figure 1, the telescope is used as a refractive optical instrument but, of course, the prior art is valid also for reflective telescopic optical systems. A field lens 12 and a relay lens 13 are associated with the objective 10 to generate an image of the wavefront received by the entrance pupil on a phase correcting device 14 such as a deformable mirror. The wavefront image produced on the phase corrector 14 makes it possible for the latter to modify selectively the phase of the wavefront surface elements. The wavefront is reflected from the surface of the deformable mirror 14 towards a beam splitter 15 that separates the beam into a first beam focused by a lens 16 onto an image detector 17 and a second beam focused by a lens 18 onto a phase distortion detector 20. This phase distortion detector 20 controls the phase correcting device 14 by means of the data processor 19.
[0018] The phase correcting device 14 can be a deformable piezoelectrically controlled-mirror. The phase distortion detecting device is a shear interferometer which, in the aforesaid American patent, is of the duplicational type with a diffraction grating.
[0020] The interferometer with lateral duplication as shown in Figure 2 comprises two reflective dihedrons 201 and 202 with an aperture of 90° and parallel edges. The beam from the telescope falls onto the splitter 203 where it is divided into two parallel beams 204 along x and 205 along y respectively situated on either side of a separative line 206 running through the edge of the dihedron 202. The beam 205 runs through a Wollaston 45° prism 207 that rotates the image through 90° about the beam axis.
[0021] Both beams 204 and 205 fall onto a splitter 208 that splits each beam into two beams 204' and 204", 205' and 205" that are respectively reflected by the two dihedrons 201 and 202 and are brought back together to interfere in the interference plane 210.
[0022] Vibrational movement is imparted to the dihedron 201 by means of a piezoelectric chip 211 driven by a high voltage alternating current generator 212. The high voltage frequency is for example 100 Hz.
[0023] If the interfering vibrational phases are given as (p(x) and (p(x+Ax) and their phase difference is
then the maximum fringe intensity is given by
[0024] If the dihedron oscillates at a frequency of wl2n, the intensity of the point x is given by (the modulation is assumed to be a sawtooth modulation):
[0025] The result then at a point of abscissa x is a signal having a modulated component with a phase shift with respect to the excitation signal that is equal to the phase difference sought after.
[0026] The dihedron 202 is mounted on a translational plate 213 and its position is set by a micrometer screw 214. The appropriate setting determines the dimensions Ax and Ay of the zone where the two wavefronts overlap. By way of an example, Δx and Ay can take values of a few tenths of a millimeter.
[0027] As a variation to the foregoing, the Wollaston prism can be eliminated. The analysis with respect to y is carried out with a second identical interferometer comprising two or more reflective dihedrons arranged like the dihedrons 201 and 202, where the edges of the second interferometer are perpendicular to those of the first.
[0029] Figure 5 shows the layout of the 16 photodetectors 52 for measuring the x-wise phase shift and the layout (identical) of the 16 photodetectors 52 for measuring the y-wise phase shift. The data processor 19 computes the values of the activating voltages based on the 2x16 phase shift values along x and y. This computation is carried out as in the prior art, and as a result processor 19 is not embodied in the present invention.
a-means (20) responsive to phase differences between different areas of said distorted wavefront for simultaneously generating in real time phase correction signals indicative of phase corrections for different areas of said distorted wavefront to achieve a corrected wavefront;
b-phase corrector means (14, 19) having said distorted wavefront incident thereon and being responsive to said phase correction signals for changing in real time phase differences between different areas of said distorted wavefront and changing the shape of said distorted wavefront to achieve said corrected wavefront; and
c-a lateral shearing interferometer means (20), having said distorted wavefront incident thereon, for determining relative phase differences between different areas of said distorted wavefront, and for generating signals indicative of said phase differences, characterized in that said lateral shearing interferometer means includes at least two reflecting dihedrons (201, 202) having each an aperture angle of 90°, the bisecting lines of which cross at the center of the interferometer means for shifting one of the dihedrons (202) through a predetermined distance parallel to the bisecting plane of the other dihedron (201) and means (211, 212) for vibrating the other dihedron parallel to its own bisecting plane.
a-Einrichtungen (20), die auf Phasenunterschiede zwischen verschiedenen Bereichen der gestörten Wellenfront zur gleichzeitigen Echtzeit-Erzeugung von Phasenkorrektursignalen ansprechen, welche Phasenkorrekturen für verschiedene Bereiche der gestörten Wellenfront zur Gewinnung einer korrigierten Wellenfront anzeigen;
b-Phasenkorrektureinrichtungen (14, 19), auf welche die gestörte Wellenfront einfällt, und die auf die Phasenkorrektursignale zur Echtzeit-Veränderung von Phasenunterschieden zwischen verschiedenen Bereichen der gestörten Wellenfront und zur Änderung der Form der gestörten Wellenfront zur Gewinnung der korrigierten Wellenfront ansprechen; und
c-ein Interferometer (20) mit seitlicher Strahlaufspaltung, in welches die gestörte Wellenfront einfällt, zur Bestimmung der relativen Phasenunterschiede zwischen verschiedenen Bereichen der gestörten Wellenfront und zur Erzeugung von Signalen, die die Phasenunterschiede anzeigen, dadurch gekennzeichnet, daß das Interferometer mit seitlicher Stahlaufspaltung wenigstens zwei reflektierende Dieder (201, 202) aufweist, von denen jeder einen Öffnungswinkel von 90° besitzt und deren Winkelhalbierungslinien sich in der Mitte des Interferometers schneiden, wobei einer der Dieder (202) um eine vorbestimmte Strecke parallel zur Winkelhalbierungsebene des anderen Dieders (201) verschoben werden kann, sowie Mittel (211, 212) zum Schwingen des anderen Dieders parallel zu seiner eigenen Winkelhalbierungsebene umfaßt.
(a) des moyens (20) répondant à des différences de phase entre diverses surfaces desdits fronts d'onde affectés de distorsions pour générer simultanément en temps réel des signaux de correction de phase représentant des corrections de phase pour différentes surfaces desdits fronts d'onde pour réaliser des fronts d'ondes corrigés;
(b) des moyens de correction de phase (14-19) recevant lesdits fronts d'onde affectés de distorsion et répondant auxdits signaux de correction de phase pour modifier en temps réel les différences de phase entre les différentes surfaces desdits fronts d'onde affectés de distortion et modifiant la forme desdits fronts d'onde effectés de distorsion pour réaliser lesdits fronts d'onde corrigés; et
(c) des moyens (20) d'interférométrie de cisaillement latéral, recevant lesdits fronts d'onde affectés de distorsion pour déterminer des différences de phase relatives entre les différentes surfaces desdits fronts d'onde affectés de distorsion et pour générer des signaux représentant lesdits différences de phase, caractérisé en ce que
lesdits moyens d'interférométrie de cisaillement latéral comprennent au moins deux dièdres réfléchissants (201, 202) ayant chacun un angle d'ouverture de 90°, dont les lignes bissectrices se coupent au centre desdits moyens d'interférométrie pour déplacer l'un des dièdres (202) d'une distance prédéterminée parallèlement au plan bissecteur de l'autre dièdre (201) et des moyens (211, 212) pour metre en vibration l'autre dièdre parallèlement à sont propre plan bissecteur.