| (19) |
 |
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(11) |
EP 0 169 744 A3 |
| (12) |
EUROPEAN PATENT APPLICATION |
| (88) |
Date of publication A3: |
|
10.06.1987 Bulletin 1987/24 |
| (43) |
Date of publication A2: |
|
29.01.1986 Bulletin 1986/05 |
| (22) |
Date of filing: 26.07.1985 |
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| (84) |
Designated Contracting States: |
|
CH DE FR LI NL SE |
| (30) |
Priority: |
26.07.1984 GB 8419070
26.07.1984 GB 8419039
|
| (71) |
Applicant: UNITED KINGDOM ATOMIC ENERGY AUTHORITY |
|
() |
|
| (72) |
Inventors: |
|
- Inman, Michael
()
- Green, Thomas Stanley
()
|
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| |
|
(57) An ion source in which a gaseous material, the source of the ions, is excited to
a plasma state by means of a radio frequency electromagnetic field. The wall of the
chamber containing the plasma is maintained at a high temperature and there is provided
a solenoidal or radial multipolar electric field thereby to cause the ion source to
produce atomic rather than malecular ions.