CONTROLLED VACUUM ARC MATERIAL DEPOSITION, METHOD AND APPARATUS - Patent 0174977

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EP 0 174 977 A1

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(43)	Date of publication:
	26.03.1986 Bulletin 1986/13

(21)	Application number: 85901674.0

(22)	Date of filing: 27.02.1985

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International Patent Classification (IPC):

C23C 14/ 24^{( . )}
H01J 37/ 32^{( . )}

C23C 14/ 32^{( . )}

(86)	International application number:
	PCT/US1985/000312

(87)	International publication number:
	WO 1985/003954 (12.09.1985 Gazette 1985/20)

(84)	Designated Contracting States:
	AT BE CH DE FR GB LI LU NL SE

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Priority:

02.03.1984 US 19840585845

(71)	Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA
	St. Paul, MN 55104 (US)

(72)	Inventors:
	RAMALINGAM, Subbiah Roseville, MN 55113 (US) QI, Cai, Bao Chinese Aeronautical Establishment Beijing (CN) KIM, Kyunghoon St. Paul, MN 55108 (US)

(74)	Representative: Schmitz, Jean-Marie, et al
	Dennemeyer & Associates Sàrl P.O. Box 1502 L-1015 Luxembourg L-1015 Luxembourg (LU)

(54)	CONTROLLED VACUUM ARC MATERIAL DEPOSITION, METHOD AND APPARATUS