(19)

(11)

EP 0 177 562 A1

(12)

(43) Date of publication: 16.04.1986 Bulletin 1986/16 (21) Application number: 85901781.0 (22) Date of filing: 19.03.1985

(51) International Patent Classification (IPC):  H01L 21/ 312( . ) H01L 23/ 532( . ) H01L 21/ 318( . ) (86) International application number: PCT/US1985/000454 (87) International publication number: WO 1985/004519 (10.10.1985 Gazette 1985/22)

(84) Designated Contracting States: DE FR GB NL (30) Priority: 22.03.1984 US 19840592152 (71) Applicant: MOSTEK CORPORATION Carrollton, TX 75006 (US)

(72) Inventors: QUINN, Daniel, J. Carrollton, TX 75007 (US) TSITOVSKY, Ilya, L. Farmers Branch, TX 75234 (US) MOZDZEN, Barbara, R. Carrollton, TX 75007 (US) WILSON, Linda, S. Pilot Point, TX 76258 (US) HELD, Charles, F. Box 8812 Lewisville, TX 76056 (US) MULHOLLAND, Wayne, A. Plano, TX 75075 (US) NGUYEN, Yen, T. Grand Prairie, TX 75051 (US) (74) Representative: Waxweiler, Jean  Dennemeyer & Associates Sàrl P.O. Box 1502 L-1015 Luxembourg L-1015 Luxembourg (LU)