(19)
(11) EP 0 178 596 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
16.09.1987 Bulletin 1987/38

(43) Date of publication A2:
23.04.1986 Bulletin 1986/17

(21) Application number: 85112882

(22) Date of filing: 11.10.1985
(84) Designated Contracting States:
BE DE FR GB IT NL

(30) Priority: 15.10.1984 US 661005

(71) Applicant: AT & T Teletype Corporation
 ()

(72) Inventors:
  • Waggener, Herbert A.
     ()
  • Zuercher, Joseph C.
     ()

   


(54) Silicon nozzle structures and method of manufacture


(57) A nozzle structure in a crystallographically oriented, monocrystalline silicon includes a pyramidal opening (11) anisotropically etched from the entrance side of the nozzle and truncated in a membrane (12) having a smaller cross-section than the initial cross-section of the entrance opening. The membrane (12) has extending therethrough a pyramidal opening (13) etched anisotropically from the exit side. The vertical axes of both openings are substantially concentric.






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