(19)
(11) EP 0 180 090 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
18.03.1987 Bulletin 1987/12

(43) Date of publication A2:
07.05.1986 Bulletin 1986/19

(21) Application number: 85113091

(22) Date of filing: 15.10.1985
(84) Designated Contracting States:
DE FR GB

(30) Priority: 30.10.1984 US 666512

(71) Applicant: International Business Machines Corporation
 ()

(72) Inventors:
  • Arbach, Gary Vincent
     ()
  • Bindra, Perminder Singh
     ()
  • Light, David Noel
     ()
  • Rath, David Lee
     ()
  • Roldan, Judith Marie
     ()

   


(54) System and method for automatically monitoring and maintaining desired concentrations of metal plating baths


(57) A system for the automatic, on-line analysis and control of additives in chemical processing solutions in manufacturing processes is disclosed.
The automatic control system embodiment includes a sensing system such as measuring a cell (10) in which appropriate sensors are located. For electrochemical measurements, a three electrode cell with a rotating disk sensor is employed to control agitation of the sample solution. Other sensors on electrodes are used to measure pH and a thermometer is provided to monitor temperature. The sensing process, like the sampling process, is automatically controlled by a controller (18).
The system, in addition to the sensing means and controller, further includes a plating tank (20), a mixing tank (22), a pump or control valve (24) and a reservoir (26). The measuring cell (10) may be disposed in the bath in a standard plating tank in which the plating bath solution is contained. Alternatively, a flow through tank may be used in which the plating solution may flow into and from as desired.
When the sensing means so determines, a replenishment bath from the reservoir can be pumped into the mixing tank by means of the pump or control valve means under the command of signals from the controller which in turn receives output signals from the measuring cell.







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