(19)

(11)

EP 0 181 397 A1

(12)

(43) Date of publication: 21.05.1986 Bulletin 1986/21 (21) Application number: 85903458.0 (22) Date of filing: 03.05.1985

(51) International Patent Classification (IPC):  G01D 5/ 353( . ) G01K 1/ 02( . ) G01K 11/ 26( . ) G01L 9/ 00( . ) G01D 5/ 26( . ) G01K 7/ 32( . ) G01L 1/ 10( . ) (86) International application number: PCT/US1985/000808 (87) International publication number: WO 1985/005178 (21.11.1985 Gazette 1985/25)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 07.05.1984 US 19840607532 (71) Applicant: THE FOXBORO COMPANY Foxboro, MA 02035 (US)	(72) Inventors: OLSEN, Everett, O. Wrentham, MA 02035 (US) BROWN, Christopher, R. Wrentham, MA 02093 (US) CHITTY, Gordon, W. Norfolk, MA 02056 (US) (74) Representative: Cooke, William Douglas, et al  Hughes Clark & Co. P.O. Box 22 114/118 Southampton Row London WC1B 5AA London WC1B 5AA (GB)