(19)

(11)

EP 0 185 709 A1

(12)

(43) Date of publication: 02.07.1986 Bulletin 1986/27 (21) Application number: 85902919.0 (22) Date of filing: 03.06.1985

(51) International Patent Classification (IPC):  G01F 1/ 84( . ) G01N 9/ 00( . ) (86) International application number: PCT/US1985/001046 (87) International publication number: WO 1985/005677 (19.12.1985 Gazette 1985/27)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 04.06.1984 US 19840616808 (71) Applicant: EXAC CORPORATION Campbell, CA 95008 (US)	(72) Inventor: DAHLIN, Erik, B. San Jose, CA 95125 (US) (74) Representative: Meddle, Alan Leonard  FORRESTER & BOEHMERT Franz-Joseph-Strasse 38 D-80801 München D-80801 München (DE)