(19)

(11)

EP 0 187 808 A1

(12)

(43) Date of publication: 23.07.1986 Bulletin 1986/30 (21) Application number: 85903407.0 (22) Date of filing: 18.07.1985

(51) International Patent Classification (IPC):  G01D 5/ 244( . ) H03M 1/ 00( . ) H03K 3/ 84( . ) (86) International application number: PCT/NL1985/000031 (87) International publication number: WO 1986/001056 (13.02.1986 Gazette 1986/04)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 20.07.1984 NL 19840002314 (71) Applicant: STICHTING CENTRUM VOOR MICRO-ELEKTRONICA NL-7511 JK Enschede (NL)	(72) Inventor: LIAN, Wei-jian NL-2611 BD Delft (NL) (74) Representative: Mommaerts, Johan Hendrik, Dipl.-Phys.  van Exter Polak & Charlouis B.V., P.O. Box 3241 NL-2280 GE Rijswijk NL-2280 GE Rijswijk (NL)