(19)

(11)

EP 0 190 137 A1

(12)

(43) Date of publication: 13.08.1986 Bulletin 1986/33 (21) Application number: 84904018.0 (22) Date of filing: 20.08.1984

(51) International Patent Classification (IPC):  H01L 21/ 28( . ) H01L 21/ 336( . ) H01L 21/ 3213( . ) (86) International application number: PCT/US1984/001336 (87) International publication number: WO 1985/005493 (05.12.1985 Gazette 1985/26)

(84) Designated Contracting States: AT BE CH DE FR GB LI LU NL SE (30) Priority: 22.05.1984 US 19840613113 (71) Applicant: Hughes Aircraft Company Los Angeles, California 90045-0066 (US)	(72) Inventors: CHEN, John, Yuan-Tai Los Angeles, CA 90066 (US) RENSCH, David, B. Thousand Oaks, CA 91320 (US)