ARRAY OF ELECTROSTATICALLY ACTUATED BINARY DEVICES AND METHODS OF MANUFACTURE - Patent 0191840

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EP 0 191 840 A1

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(43)	Date of publication:
	27.08.1986 Bulletin 1986/35

(21)	Application number: 85904348.0

(22)	Date of filing: 19.08.1985

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International Patent Classification (IPC):

G09F 9/ 37^{( . )}

(86)	International application number:
	PCT/US1985/001584

(87)	International publication number:
	WO 1986/001625 (13.03.1986 Gazette 1986/06)

(84)	Designated Contracting States:
	DE FR GB IT NL SE

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Priority:

21.08.1984 US 19840642997

(71)	Applicants:
	SIMPSON, George, R. Westport, CT 06880 (US) SULLIVAN, Herbert W. New York, NY 10023 (US)

(72)	Inventors:
	SIMPSON, George, R. Westport, CT 06880 (US) SULLIVAN, Herbert W. New York, NY 10023 (US)

(74)	Representative: Strehl Schübel-Hopf Groening & Partner
	Maximilianstrasse 54 D-80538 München D-80538 München (DE)

(54)	ARRAY OF ELECTROSTATICALLY ACTUATED BINARY DEVICES AND METHODS OF MANUFACTURE