(19)
(11) EP 0 195 052 A1

(12)

(43) Date of publication:
24.09.1986 Bulletin 1986/39

(21) Application number: 85904768.0

(22) Date of filing: 25.09.1985
(51) International Patent Classification (IPC): 
B01J 8/ 08( . )
B01J 19/ 08( . )
C08J 7/ 00( . )
H01J 37/ 32( . )
H05H 1/ 36( . )
H05H 1/ 44( . )
B01J 12/ 00( . )
B05B 7/ 22( . )
C23C 4/ 12( . )
H05H 1/ 32( . )
H05H 1/ 42( . )
(86) International application number:
PCT/US1985/001823
(87) International publication number:
WO 1986/002024 (10.04.1986 Gazette 1986/08)
(84) Designated Contracting States:
BE CH DE FR GB IT LI NL SE

(30) Priority: 27.09.1984 US 19840655340

(71) Applicant: REGENTS OF THE UNIVERSITY OF MINNESOTA
St. Paul, Minnesota 55401 (US)

(72) Inventor:
  • PFENDER, Emil
    West St. Paul, MN 55118 (US)

(74) Representative: Cross, Rupert Edward Blount, et al 
BOULT, WADE & TENNANT 27 Furnival Street
London EC4A 1PQ
London EC4A 1PQ (GB)

   


(54) MULTIPLE ARC PLASMA DEVICE WITH CONTINUOUS GAS JET