PROCESS FOR ETCHING POLYSILICON WITH FREON 11 AND ANOTHER GAS - Patent 0197044

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EP 0 197 044 A1

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(43)	Date of publication:
	15.10.1986 Bulletin 1986/42

(21)	Application number: 85904367.0

(22)	Date of filing: 26.08.1985

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International Patent Classification (IPC):

H01L 21/ 302^{( . )}
H01L 21/ 3213^{( . )}

H01L 21/ 3065^{( . )}

(86)	International application number:
	PCT/US1985/001609

(87)	International publication number:
	WO 1986/002199 (10.04.1986 Gazette 1986/08)

(84)	Designated Contracting States:
	DE FR GB

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Priority:

01.10.1984 US 19840656200

(71)	Applicant: TEGAL CORPORATION
	Novato California 94947 (US)

(72)	Inventor:
	SCANNELL, Jack, Wayne Phoenix, AZ 85029 (US)

(74)	Representative: Ibbotson, Harold
	Motorola European Intellectual Property Midpoint Alencon Link Basingstoke Hampshire RG21 1PL Basingstoke Hampshire RG21 1PL (GB)

(54)	PROCESS FOR ETCHING POLYSILICON WITH FREON 11 AND ANOTHER GAS