(19)
(11)
EP 0 197 936 A1
(12)
(43)
Date of publication:
22.10.1986
Bulletin 1986/43
(21)
Application number:
85900490.0
(22)
Date of filing:
27.12.1984
(51)
International Patent Classification (IPC):
C23C
14/
34
( . )
H01J
37/
34
( . )
(86)
International application number:
PCT/GB1984/000452
(87)
International publication number:
WO 1985/002866
(
04.07.1985
Gazette 1985/15)
(84)
Designated Contracting States:
AT BE CH DE FR GB LI LU NL SE
(30)
Priority:
23.12.1983
GB 19830034369
(71)
Applicant:
ION TECH LIMITED
Middlesex TW11 0LT (GB)
(72)
Inventor:
EVANS, David, Roger
Petersfield Hampshire GU31 4NR (GB)
(54)
SPUTTER DEPOSITION