(19)
(11) EP 0 197 936 A1

(12)

(43) Date of publication:
22.10.1986 Bulletin 1986/43

(21) Application number: 85900490.0

(22) Date of filing: 27.12.1984
(51) International Patent Classification (IPC): 
C23C 14/ 34( . )
H01J 37/ 34( . )
(86) International application number:
PCT/GB1984/000452
(87) International publication number:
WO 1985/002866 (04.07.1985 Gazette 1985/15)
(84) Designated Contracting States:
AT BE CH DE FR GB LI LU NL SE

(30) Priority: 23.12.1983 GB 19830034369

(71) Applicant: ION TECH LIMITED
Middlesex TW11 0LT (GB)

(72) Inventor:
  • EVANS, David, Roger
    Petersfield Hampshire GU31 4NR (GB)

   


(54) SPUTTER DEPOSITION