TECHNIQUE FOR THE GROWTH OF EPITAXIAL COMPOUND SEMICONDUCTOR FILMS - Patent 0199736

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EP 0 199 736 A1

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(43)	Date of publication:
	05.11.1986 Bulletin 1986/45

(21)	Application number: 85903962.0

(22)	Date of filing: 07.08.1985

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International Patent Classification (IPC):

H01L 21/ 205^{( . )}

C30B 25/ 02^{( . )}

(86)	International application number:
	PCT/US1985/001483

(87)	International publication number:
	WO 1986/002776 (09.05.1986 Gazette 1986/10)

(84)	Designated Contracting States:
	BE DE FR GB IT NL SE

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Priority:

31.10.1984 US 19840666831

(71)	Applicant: BELL COMMUNICATIONS RESEARCH, INC.
	Livingston, New Jersey 07039-2729 (US)

(72)	Inventors:
	BHAT, Rajaram Scotch Plains, NJ 07076 (US) COX, Herbert, Michael Berkeley Heights, NJ 07922 (US)

(74)	Representative: Lips, Hendrik Jan George, Ir., et al
	HAAGSCH OCTROOIBUREAU Breitnerlaan 146 NL-2596 HG Den Haag NL-2596 HG Den Haag (NL)

(54)	TECHNIQUE FOR THE GROWTH OF EPITAXIAL COMPOUND SEMICONDUCTOR FILMS