(19)

(11)

EP 0 214 277 A1

(12)

(43) Date of publication: 18.03.1987 Bulletin 1987/12 (21) Application number: 86902122.0 (22) Date of filing: 03.03.1986

(51) International Patent Classification (IPC):  F04B 37/ 08( . ) (86) International application number: PCT/US1986/000462 (87) International publication number: WO 1986/005240 (12.09.1986 Gazette 1986/20)

(84) Designated Contracting States: CH DE FR GB IT LI NL (30) Priority: 01.03.1985 US 19850707467 (71) Applicant: HELIX TECHNOLOGY CORPORATION Waltham Massachusetts 02254 (US)	(72) Inventors: ANDEEN, Bruce, R. Acton, MA 01720 (US) PANDORF, Robert, C. Newton Highlands, MA 02161 (US) (74) Representative: Holdcroft, James Gerald, Dr., et al  Graham Watt & Co., Riverhead Sevenoaks, Kent TN13 2BN Sevenoaks, Kent TN13 2BN (GB)