IN-lINE DISK SPUTTERING SYSTEM - Patent 0222877

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EP 0 222 877 A1

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(43)	Date of publication:
	27.05.1987 Bulletin 1987/22

(21)	Application number: 86903783.0

(22)	Date of filing: 08.05.1986

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International Patent Classification (IPC):

C23C 14/ 34^{( . )}
H01L 21/ 677^{( . )}

C23C 14/ 56^{( . )}

(86)	International application number:
	PCT/US1986/001010

(87)	International publication number:
	WO 1986/006753 (20.11.1986 Gazette 1986/25)

(84)	Designated Contracting States:
	BE DE FR GB IT LU NL SE

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Priority:

09.05.1985 US 19850732878

(71)	Applicant: SEAGATE TECHNOLOGY
	Scotts Valley, California 95066 (US)

(72)	Inventors:
	FLINT, Alan Los Gatos, CA 95030 (US) MILLER, Ken Mountain View, CA 94043 (US) SHAH, Sushil Sunnyvale, CA 94086 (US)

(74)	Representative: Barlow, Roy James, et al
	J.A. KEMP & CO. 14, South Square, Gray's Inn London WC1R 5LX London WC1R 5LX (GB)

(54)	IN-lINE DISK SPUTTERING SYSTEM