(19)
(11)
EP 0 225 379 A1
(12)
(43)
Date of publication:
16.06.1987
Bulletin 1987/25
(21)
Application number:
86903965.0
(22)
Date of filing:
05.06.1986
(51)
International Patent Classification (IPC):
F16K
31/
02
( . )
G05D
16/
20
( . )
F16K
31/
00
( . )
H01L
41/
09
( . )
(86)
International application number:
PCT/US1986/001220
(87)
International publication number:
WO 1986/007429
(
18.12.1986
Gazette 1986/27)
(84)
Designated Contracting States:
AT BE CH DE FR GB IT LI LU NL SE
(30)
Priority:
11.06.1985
US 19850743720
(71)
Applicant:
ARTHUR D. LITTLE, INC.
Cambridge, Massachusetts 02140-2390 (US)
(72)
Inventor:
LAWRENCE, Willis, T.
Winchester, MA 01890 (US)
(74)
Representative:
Warren, Anthony Robert, et al
BARON & WARREN, 18 South End, Kensington
London W8 5BU
London W8 5BU (GB)
(54)
APPARATUS FOR ELECTRICAL CONTROL OF RATE OF FLUID FLOW