(19)
(11)
EP 0 229 104 A1
(12)
(43)
Date of publication:
22.07.1987
Bulletin 1987/30
(21)
Application number:
86903910.0
(22)
Date of filing:
27.05.1986
(51)
International Patent Classification (IPC):
H01L
21/
302
( . )
H01L
21/
3065
( . )
H01L
21/
311
( . )
H01L
21/
301
( . )
H01L
21/
308
( . )
H01L
21/
3213
( . )
(86)
International application number:
PCT/US1986/001155
(87)
International publication number:
WO 1987/000345
(
15.01.1987
Gazette 1987/01)
(84)
Designated Contracting States:
BE DE FR GB IT NL SE
(30)
Priority:
28.06.1985
US 19850750084
(71)
Applicant:
AT&T Corp.
New York, NY 10013-2412 (US)
(72)
Inventor:
SCHUTZ, Ronald, Joseph
Warren, NJ 07060 (US)
(74)
Representative:
Johnston, Kenneth Graham
AT&T (UK) Ltd. 5 Mornington Road
Woodford Green Essex, IG8 OTU
Woodford Green Essex, IG8 OTU (GB)
(54)
PROCEDURE FOR FABRICATING DEVICES INVOLVING DRY ETCHING