(19)
(11) EP 0 229 104 A1

(12)

(43) Date of publication:
22.07.1987 Bulletin 1987/30

(21) Application number: 86903910.0

(22) Date of filing: 27.05.1986
(51) International Patent Classification (IPC): 
H01L 21/ 302( . )
H01L 21/ 3065( . )
H01L 21/ 311( . )
H01L 21/ 301( . )
H01L 21/ 308( . )
H01L 21/ 3213( . )
(86) International application number:
PCT/US1986/001155
(87) International publication number:
WO 1987/000345 (15.01.1987 Gazette 1987/01)
(84) Designated Contracting States:
BE DE FR GB IT NL SE

(30) Priority: 28.06.1985 US 19850750084

(71) Applicant: AT&T Corp.
New York, NY 10013-2412 (US)

(72) Inventor:
  • SCHUTZ, Ronald, Joseph
    Warren, NJ 07060 (US)

(74) Representative: Johnston, Kenneth Graham 
AT&T (UK) Ltd. 5 Mornington Road
Woodford Green Essex, IG8 OTU
Woodford Green Essex, IG8 OTU (GB)

   


(54) PROCEDURE FOR FABRICATING DEVICES INVOLVING DRY ETCHING