(19)
(11) EP 0 231 206 A1

(12)

(43) Date of publication:
12.08.1987 Bulletin 1987/33

(21) Application number: 86903924.0

(22) Date of filing: 30.05.1986
(51) International Patent Classification (IPC): 
H01L 21/ 336( . )
(86) International application number:
PCT/US1986/001170
(87) International publication number:
WO 1987/000967 (12.02.1987 Gazette 1987/04)
(84) Designated Contracting States:
DE FR GB IT

(30) Priority: 08.08.1985 US 19850763492

(71) Applicant: MOTOROLA, INC.
Schaumburg, IL 60196 (US)

(72) Inventors:
  • HARTMAN, Dennis, Carl
    Austin, TX 78731 (US)
  • CHENG, Shih, King
    Austin, TX 78728 (US)

   


(54) DIELECTRIC BREAKDOWN PREVENTION TECHNIQUE