FIELD OF THE INVENTION AND RELATED ART
[0001] The present invention relates to a device for electrically discharging a member to
be discharged or for electrically charging a member to be charged, more particularly
to a device for charging or discharging an image bearing member in an image forming
apparatus such as an electrophotographic copying apparatus and an electrostatic recording
apparatus.
[0002] In the field of an electrophotographic apparatus using an electrophotographic process,
such as an electrophotographic copying machine, a laser beam printer and LED (light
emitting diode) printer, and in the field of electrostatic recording apparatus using
an electrostatic recording system, such as a facsimile machine and electrostatic printer,
an image bearing member, such as a photosensitive member or an insulating member,
is electrically charged or discharged. For this purpose, a corona discharging device
has been widely used, which comprises a wire having a diameter of several tens microns
which is supplied with a high voltage, e.g., several KV so as to produce corona discharging.
[0003] However, the corona discharging device involves a drawback that the discharge distribution
becomes non-uniform even by a slight contamination of the wire, and the non-uniformness
results in non-uniformly discharging or charging the member to be discharged or the
member to be discharged. Additionally, it is required that the wire is spaced from
a conductive shield by a certain or more distance, and therefore, there is a limit
in reducing the size of the device. Also, the on-set voltage for starting the corona
discharging is relatively high, thus necessiating a bulky power source.
[0004] As another type of discharging or charging device, it has been proposed that in U.S.
Patent No. 4,155,093, for example, that an alternating voltage is applied between
electrodes sandwiching a dielectric member to produce electric discharge in an air
gap between a lateral side surface of one of the electrodes and the adjacent surface
of the dielectric member, so that positive and negative ions are produced; and the
ions having a predetermined polarity is extracted to and deposited onto the member
to be discharged or the member to be charged by an electric field formed by a DC bias
voltage applied between said one of the electrodes and the member to be charged or
discharged. In this device, the application of the AC voltage produces so active discharge
that said one of the electrodes functioning as a discharging electrode is not easily
contaminated, with the additional advantage of the relatively lower voltage applied
than in the conventional corona discharging device and the advantage of the smallness
of the device.
[0005] However, said one of the electrodes in the neighborhood of which the discharge occurs,
is exposed in the air. Since a strong discharge action takes place particularly adjacent
to the lateral side of this electrode, electrode is easily colloded or damaged by
plasma etching or oxidization caused by the discharging. When the damage is produced
in the electrode, the non-uniform discharging results, so that the discharging or
charging action becomes non-uniform. Because of these, there still is a practical
problem in the durability.
[0006] Further, another type of discharging and charging devices are known, as disclosed
in Japanese Laid-Open Patent Applications Nos. 108559/1983 and 157183/1985, wherein
a plurality of electrodes are embedded in a body of a dielectric member, and between
the electrodes, an alternating voltage is applied to produce a discharge adjacent
a surface of the dielectric member.
[0007] In the device disclosed in the former Japanese Publication, all of the electrodes
are entirely embedded in the dielectric member. Therefore, with use, the surface of
the dielectric member is charged up to the polarity opposite to that of the charging
ions. As a result, the DC electric field formed between the electrode in the dielectric
member and the ground is reduced, and therefore, it is considered that the desired
charging current can not be provided. In any event, the charging efficiency is significantly
low.
[0008] In the device disclosed in the latter Japanese publication two electrodes are embedded
in a dielectric member, and one electrode is mounted to a surface of the dielectric
member, bridging the two electrodes in the dielectric member. However, the discharging
principle of this device is essentially the same as that of the above-described U.S.
Patent No. 4,155,093 because the discharge occurs in the air gap between the lateral
surface of the outside electrode and that portion of the dielectric member surface
as is opposed to the two electrodes in the dielectric member. Therefore, this device
remains involving the problem of the damage or collosion of the lateral surface of
the electrode.
SUMMARY OF THE INVENTION
[0009] Accordingly, it is a principal object of the present invention to provide a discharging
or charging device capable of uniformly charging or discharging a member, which comprises
at least two electrodes in a dielectric member, wherein an alternating voltage is
applied between the electrodes, and wherein a desired polarity of the ions can be
efficiently extracted with less collosion or damage to the electrode and with the
high durability.
[0010] It is another object of the present invention to provide a charging or discharging
device which is not influenced by the change in the ambient conditions such as the
relative humidity, and therefore the discharging distribution is always uniform with
stability.
[0011] It is a further object of the present invention to provide a charging or discharging
device wherein the durability of a dielectric member in which the electrodes are embedded
is high.
[0012] It is a further object of the present invention to provide a stably operable charging
or discharging device which is not easily contaminated and which is small in size
and operable by a relatively low voltage.
[0013] These and other objects, features and advantages of the present invention will become
more apparent upon a consideration of the following description of the preferred embodiments
of the present invention taken in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014]
Figure 1 is a sectional view of a device according to an embodiment of the present
invention.
Figure 2 shows an electric equivalent circuit of the device shown in Figure 1.
Figure 3 is a sectional view of a device according to another embodiment of the present
invention.
Figure 4 is a sectional view of a device according to a further embodiment of the
present invention.
Figure 5 shows an electrical equivalent circuit of the device of Figure 4.
Figure 6 is a sectional view of a device according to a further embodiment of the
present invention.
Figure 7 is a sectional view of a further embodiment of the present invention.
Figures 8, 9, 10 and 11 are sectional views of first improved embodiments of the device
according to the present invention.
Figure 12 is a sectional view of a second improved embodiment of the present invention.
Figure 13 is a graph showing a change of a surface temperature of a dielectric member
when a heat control is employed and when it is not employed.
Figure 14 is a perspective view of a modification of the second improved embodiment
of the present invention.
Figure 15 is a sectional view of the device according to a third improved embodiment
of the present invention.
Figure 16 is a graph showing a relation between a temperature of the discharging surface
and the charging current in Figure 15, when a constant current control is not employed.
Figure 17 is a graph showing a temperature of the discharging surface and the alternating
voltage in the device of Figure 15 when the charging current is constant.
Figure 18 is a block diagram illustrating a control for constant current in the device
of Figure 15.
Figure 19 is a block diagram illustrating a constant current control of a fourth improved
embodiment of the present invention.
Figure 20 is a graph showing the relation between a temperature of the discharging
surface and the frequency of the alternating voltage in the device of Figure 19 when
the charging current is constant.
Figure 21 is a sectional view of a device according to a fifth embodiment of the present
invention.
Figure 22 is a block diagram illustrating a control for constant current for the device
of Figure 21.
Figure 23 is a graph showing the relation between a temperature of the discharging
surface and ' the bias voltage in the device of Figure 21 when the charging current
is constant.
Figure 24 is a sectional view of a device according to a sixth improved embodiment
of the present invention.
Figure 25 is a block diagram illustrating a control for the constant current in the
device of Figure 24.
Figure 26 shows characteristics of the constant current control in the device of Figure
24.
Figures 27, 28 and 29 are sectional views of various modifications of the dielectric
member used with the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0015] Referring to Figure 1, there is shown a discharging device according to an embodiment
of the present invention.
[0016] The discharging device 1 includes a dielectric member 10, at least two electrodes
11 and 12 embedded in the dielectric member 10 and an exposed electrode 13 which is
exposed in the air. The discharging device 1 electrically discharge or charge a member
2 to be discharged or charged, which includes an insulating or photoconductive layer
17 and a conductive layer 18 which functions as a back electrode. In this embodiment,
the member 2 is movable relative to the charging device 1. The charging device 1 is
usable for electrically discharging the member 2 or charging it. However, the following
description will be made as to the case of charging the member only, for the sake
of simplicity of explanation.
[0017] In this Specification, "charging" means that ions of a predetermined polarity are
applied to a member to be charged and are deposited thereon, while "discharging" means
that ions of a predetermined polarity is removed from a member to be discharged which
has been charged, so that the charge is erased.
[0018] Each of the above described components of the discharging device 1 according to this
embodiment, will be described.
[0019] The dielectric member 10 is of a solid inorganic dielectric material having durability
to discharge, such as glass, ceramic, oxide, e.g., SiO₂, MgO and Al₂O₃, nitride, e.g.,
Si₃N₄, AlN. The dielectric member 10 is an elongated member having a substantially
rectangular cross section. Each of the electrodes 11, 12 and 13 extends along the
length of the dielectric member 10. The embedded electrodes 11 and 12 are arranged
substantially parallel to each other in the dielectric member 10. The embedded electrodes
11 and 12 are also parallel to the bottom surface, as seen in Figure 1, of the dielectric
member 10 (the surface opposed to the member to be charged 2) and are spaced from
the bottom surface by the same distance. This arrangement is not innevitable, but
preferable from the standpoint of easy manufacturing. The material of the electrodes
is Al, Cr, Au, Ni or the like, for example. It should be noted that those electrodes
are embedded in the dielectric member 10 and is not exposed to the air. Therefore,
it is protected from collosion or damage, and this is why the above mentioned materials
are usable without decreasing the high durability.
[0020] The distance between the embedded electrodes is preferably not less than 1 micron,
more preferably 3 - 200 microns in consideration of the dielectric strength.
[0021] The embedded electrodes 11 and 12 are disposed at such a position, respectively,
that when an alternating voltage is applied therebetween, a discharge occurs adjacent
a part of the surface of the dielectric member 10 at a predetermined on-set voltage
(discharge starting voltage). That is, when an alternating voltage not less than the
on-set voltage is applied by an alternating power source 14 between the embedded electrodes
11 and 12, a discharge occurs, positive and negative ions are alternately produced,
in a single region indicated by a reference numeral 15. The center of the region is
substantially at a portion of the bottom surface of the dielectric member 10 (the
surface substantially parallel to a line connecting the electrodes 11 and 12 to which
the alternating voltage is applied) that is opposed to a portion between the electrodes.
The on-set voltage is dependent on the distance between the embedded electrodes 11
and 12, the thickness of the dielectric member below the embedded electrodes, a dielectric
constant of the dielectric member and the like, and it is suitably determined by one
skilled in the art.
[0022] The exposed electrode 13 is fixed to the surface of the dielectric member 10 where
the discharge occurs by the application of the alternating voltage. The material of
the electrode 13 is conductive metal having high anti-collosion and anti-oxidation
properties, for example, a high fusing point metal such as Ti, W, Cr, Te, Mo, Fe,
Co, Ni, Au and Pt or an alloy containing one or more of those metals, or an oxide
thereof. The thickness of the exposed electrode 13 is 0.1 - 100 microns, preferably
0.2 - 20 microns, and the width thereof is not less than 1 micron, preferably 10 -
500 microns. The position of the exposed electrode 13 is adjacent to the discharge
occurrence region 15, and the position is such that an alternating voltage which initiates
the discharge in cooperation with any one of the embedded electrodes 11 and 13 is
higher than the above described on-set voltage. More particularly, when the voltage
applied between the embedded electrodes 11 and 12 is increased from below the on-set
voltage, the discharge starts in the region 15 at the on-set voltage, but no discharge
occurs between any one of the embedded electrodes 11 and 12 and the exposed electrode
13. The exposed electrode 13 is disposed at such a position. Here, "adjacent the discharge
region" includes the inside and outside thereof. The outside is preferable, but the
inside is possible if it is near the edge of the discharge region with the advantages
of the present invention.
[0023] In this embodiment, the dielectric member 10 is of one integral member. However,
it may be formed as two layers of dielectric material which are bonded at the broken
line which is flush with the top and/or bottom surface of the embedded electrodes
11 and 12. In this case, the materials of the respective layers may be the same or
different. Particularly when the dielectric member is of the two layered structure,
that one of the layers exposed to the discharge region is of inorganic material or
the like which exhibits a high durability to the discharge so as to assure the life
of the dielectric material; while the other layer may be of organic dielectric material.
In either cases (one layer or two layer), the thickness of the dielectric member below
the embedded electrodes 11 and 12 is preferably not less than 1 micron and not more
than 500 microns, particularly preferably, not less than 3 microns and not more than
200 microns. The details of the multi-layer structure of the dielectric member will
be described hereinafter.
[0024] Description will be made as to the relation among the applied alternating voltage
starting discharge between the embedded electrodes 11 and 12, the applied alternating
voltage starting the discharge between the embedded electrode 11 and the exposed electrode
13 and the applied alternating voltage starting the discharge between the embedded
electrode 12 and the exposed electrode 13, in connection with the impedances of the
respective electric circuits in the discharging device 1 of this embodiment.
[0025] Figure 2 illustrates an electric equivalent circuit to the discharging device shown
in Figure 1, wherein Z1 is an impedance corresponding to the electrostatic capacity
of the air existing between the embedded electrodes 11 and 12 in the discharging path
therebetween; Z2 is an impedance corresponding to an electrostatic capacity of the
air existing between the embedded electrode 11 and the exposed electrode 13 in the
discharging path therebetween; Z3 and Z4 are impedances corresponding to electrostatic
capacities of the air existing between the embedded electrode 11 and the exposed electrode
13 in the discharge path therebetween and between the embedded electrode 12 and the
exposed electrode 13 in the discharge path therebetween, respectively. As understood,
there are four possible discharge paths, a Z1 loop containing the impedance Z1, a
Z2 loop containing the impedance Z2, (Z2+Z3) loop containing the impedances Z2 and
Z3 and (Z2+Z4) loop containing the impedances Z2 and Z4. In this equivalent circuit,
if Z1<Z2, Z1<Z2+Z3 and Z1<Z2+Z4 are satisfied, the voltage which is applied between
the embedded electrodes 11 and 12 and which starts the discharge in the respective
discharge paths satisfy:
V1 < V2, V3, V4
where V1 is an applied alternating voltage between the embedded electrodes 11 and
12 which starts the discharge in the Z1 loop;
V2 is an applied alternating voltage between the embedded electrodes 11 and 12 which
starts the discharge in the Z2 loop;
V3 is an applied alternating voltage between the embedded electrodes 11 and 12 which
starts the discharge in the (Z2+Z3) loop;
V4 is an applied alternating voltage between the embedded electrodes 11 and 12 which
starts the discharge in the (Z2+Z4) loop.
[0026] In Figure 1 embodiment, the above described relations in the discharge starting voltages
are realized by providing the exposed electrode 13 only adjacent to one of the embedded
electrodes, for example, the embedded electrode 12 and by disposing an inside lateral
surface of the exposed electrode 13 outside that lateral end of the embedded electrode
12 which is opposed to the embedded electrode 11.
[0027] Now, the description will be made with respect to the operation of the discharging
device 1 of this embodiment.
[0028] First, the exposed electrode 13 of the discharging device 1 is placed opposed to
the insulating or photoconductive layer 17 of the member 2 to be charged. Then, an
alternating voltage which is not less than the discharge starting voltage is applied
by the alternating voltage source 14 between the embedded electrodes 11 and 12, while
a DC bias voltage is applied by the DC bias voltage source 19 between the exposed
electrode 13 and the conductive layer of the member 2 to be charged. The alternating
voltage has 0.5 - 6 KVpp (peak-to-peak), preferably 1 - 4 KVpp, while the DC bias
voltage is 0.2 - 4 KV, preferably 0.5 - 2 KV. Here, it should be noted that an electric
insulation of DC current is established between an AC circuit constituted by the alternating
voltage source 14, the dielectric member 10, the embedded electrode 11 and the embedded
electrode 12 and a DC electric circuit constituted by the DC bias voltage source 19,
the exposed electrode 13 and the conductive layer 18.
[0029] By the application of the alternating voltage from the alternating voltage source
14, the electric discharge occurs in the discharge region 15, whereby positive and
negative ions are produced there.
[0030] For the purpose of better understanding the present invention, an explanation will
be made with respect to the case where there is no exposed electrode 13. When the
alternating voltage is applied between the embedded electrode 11 and 12 without the
exposed electrode 13, the ions are produced in the discharge region 15. However, the
produced ions are bound by the strong electric field formed between the embedded electrodes
11 and 12, so that the ions are produced and disappeared repeatedly in accordance
with the phase change of the alternating voltage, and it is not possible to move the
ions to the member 2 to be charged. In an attempt to extract the produced ions, it
would be considered that a DC bias voltage is applied between the embedded electrode
12 and the conductive layer 18 of the member 2 to be charged. If it is possible by
this method to extract the produced ions of the desired polarity toward the member
2 to be charged, it is preferable from the standpoint of the durability because it
is not necessary to use any exposed electrode. However, the inventors have found and
confirmed that with this structure, it is not possible to move the produced ions toward
the insulating or photoconductive layer of the member 2 to be charged.
[0031] The reason for this is considered as being as follows. For example, it is assumed
that a positive voltage is applied to the embedded electrode 12 relative to the conductive
layer 18 in an attempt to move the positive ions to the member 2. Then, the positive
potential applied to the embedded electrode 12 retains negative ions on the bottom
surface of the dielectric member 10. The negative ions accumulated there in this manner
function to weaken the electric field between the embedded electrode 12 and the member
2 to be charged, necessarily resulting in weakening the effect expected by the application
of the positive voltage.
[0032] Therefore, even if the bias voltage is applied between the embedded electrode 12
and the conductive layer 18, the ions are not extracted toward the member 2 due to
the weakening of the electric field.
[0033] The applied alternating voltage between the embedded electrodes 11 and 12 at the
time when the discharge starts between the exposed electrode 13 and the embedded electrode
11 and between the exposed electrode 13 and the embedded electrode 12, is higher than
the applied alternating voltage between the embedded electrodes 11 and 12 at the time
when the discharge starts adjacent the dielectric member between the embedded electrodes
11 and 12. Therefore, when the discharge starts by the application of the alternating
voltage between the embedded electrode 11 and the embedded electrode 12, no discharge
occurs adjacent the surface of the exposed electrode 13 by the application of the
alternating voltage only by the alternating source 14. However, even in the region
outside the discharge region 15, the exposed electrode 13 is placed in the state under
which the discharge easily occurs in the neighborhood of the discharge region 15,
by the influence by the alternating electric field by the alternating voltage source
14. This state is stimulated by the application of the bias voltage between the exposed
electrode and the conductive layer 18 by the DC bias source 19, and therefore, a discharge
occurs in the neighborhood of the exposed electrode 13 so that positive and negative
ions are produced. This discharge is relatively weak as compared with the discharge
in the discharge region 15. Here, the weakness of the discharge can be discriminated
if the luminous phenomenon is observed by naked eyes. More particularly, the observation
is made when the power is supplied to the DC bias voltage source and when the power
supply thereto is stopped. Because of the weakness of the discharge in the neighborhood
of the exposed electrode 13, the surface of the exposed electrode 13 is not deteriorated
by plasma etching or oxidation which otherwise caused by discharge action. Therefore,
the durability of the discharge device of this embodiment is high. If the exposed
electrode 13 is so disposed that its inside lateral surface is adjacent to the lateral
end of the discharge region 15 and inside thereof, the discharge occurs also in the
neighborhood of the surface of the exposed electrode 13 by the alternating voltage
applied between the embedded electrodes 11 and 12. However, the alternating voltage
to be applied between the embedded electrodes 11 and 12 to start this discharge is
higher than the alternating voltage therebetween for starting the discharge between
the embedded electrodes 11 and 12, and therefore, the strong discharge is concentrated
to the surface of the dielectric member between the embedded electrodes 11 and 12,
and for this reason, the deterioration of the exposed electrode 13 is significantly
small as compared with the conventional discharger.
[0034] In this embodiment, it is preferable that the position of the exposed electrode 13
is not distant very much from the positions of the embedded electrodes 11 and 12,
in other words, that it is not outside the influence by the alternating field. More
particularly, it is preferable that the exposed electrode 13 is placed at such a position
that Voff > Von is satisfied, where Voff is a bias voltage which starts a discharge
in the neighborhood of the exposed electrode 13 without application of the alternating
voltage between the embedded electrodes, and Von is a bias voltage which starts the
discharge in the neighborhood of the exposed electrode 13 with the alternating voltage
applied between the embedded electrodes.
[0035] On the other hand, the ions produced in the neighborhood of the exposed electrode
13 are extracted toward the member 2 to be charged by the electric field formed by
the bias voltage applied between the exposed electrode 13 and the member 2 to be charged
by the DC bias voltage source 19, and they are deposited on the insulating or photoconductive
layer 12 surface of the member 2, thus charging the member 2 to the polarity of the
extracted ions. In the discharging action, the ions produced in the strong discharge
regions 15 by the application of the alternating voltage between the embedded electrodes
11 and 12 is hardly utilized for the charging of the member 2, and the ions used for
charging the member 2 are mainly in the ions produced by the relatively weak discharge
adjacent to the exposed electrode 13. From this standpoint, the discharge by the alternating
voltage functions rather "cue" for the production of ions usable to charge or discharge
the member 2, than as directly charging or discharging the member 2.
[0036] To confirm the effects of the present invention, the comparison has been made between
a discharging device employing the exposed electrode disclosed in U.S. Patent No.
4,155,093 and the discharger of this embodiment, which have been manufactured by the
same materials, more particularly, the dielectric member is of SiO₂, and the exposed
electrode is of Ti, under the conditions that the same charging current is provided,
that is, the same charging effect is provided. The thickness of the dielectric member
between the electrode and the other electrode was 200 microns in the conventional
device, and 10 microns in our device. The alternating voltage was 3 KVpp, 30 KHz in
the conventional device, and 1.7 KVpp, 30 KHz in the device of this embodiment. When
these were actually operated, the remarkable deterioration was observed in approximately
10 - 15 hours of the continuous operation in the conventional device, which resulted
in non-uniform charging of the member. On the contrary, in the device of the embodiment
of this invention, hardly any deterioration of the exposed electrode 13 was observed
in 300 hours of the continuous operation. There was no non-uniform charging. Even
in the case where the inside lateral surface of the exposed electrode 13 was in the
neighborhood of and inside the discharge area, the non-uniform discharge was not
observed in 300 hours of the continuous operation, and only a slight color change
was observed on the surface of the exposed electrode 13 without any remarkable deterioration.
[0037] Figure 3 illustrates another embodiment of the present invention. Since this embodiment
is similar to the previous embodiment with the exception of the points described hereinafter,
the detailed description has been omitted by assigning the same reference numerals
to the corresponding elements. The discharging device of this embodiment has a bottom
surface partly cut away in the middle of the dielectric member to form a recess or
opening 10′. It should be noted, however, that the embedded electrode 11 and the embedded
electrode 12 are not exposed to the air, but they are embedded in the dielectric member
10. Adjacent the edge of the recess 10′, there is fixed the exposed electrode 13.
When an alternating voltage is applied between the embedded electrodes by the alternating
voltage source 14, the discharge occurs in the region indicated by a reference numeral
15 in Figure 3, whereby positive and negative ions are produced. Under the influence
of the electric field formed by the alternating voltage, a relatively weak discharge
occurs in the neighborhood of the exposed electrode 13, so that ions are produced,
which are in turn extracted to the insulating or photoconductive layer 17 of the member
2 to be charged, by the bias electric field formed between the exposed electrode 13
and the conductive layer 18. In this embodiment, the relation among the discharge
starting voltages in the respective discharge path is satisfied. However, contrary
to the case of Figure 1, the inside lateral surface of the exposed electrode 13 is
disposed at such a position as corresponds to between the inside lateral surfaces
of the embedded electrodes 11 and 12. The present invention can be embodied in this
manner.
[0038] Figure 4 illustrates a further embodiment of the present invention. In this embodiment,
the discharging device 31 comprises a dielectric member 40, at least two embedded
electrodes 41 and 42 and exposed electrode 43. By the discharging device 31, a member
32 to be charged or discharged is electrically charged or discharged. The member 32
comprises an insulating or photoconductive layer 47 and a conductive layer 48 functioning
as a back electrode. A relative movement is caused between the discharging device
31 and the member 32. Similarly to the embodiments described in the foregoing, the
discharging device of this embodiment is usable to electrically discharge or charge
the member 32, but the following descriptions will be made with respect to the case
where it is electrically charged.
[0039] The dielectric member 40 is of inorganic solid dielectric member durable to discharge,
for example an oxide such as glass, ceramic, SiO₂, MgO and Al₂O₃ or a nitride such
as SiN and AlN. In this embodiment, the dielectric member 40 is an elongated member
having a rectangular cross section. The electrodes 41, 42 and 43 extend along the
length of the dielectric member 40. In this embodiment, two electrodes 41 and 42 are
embedded in the dielectric member 40 and extend substantially parallel to each other.
The embedded electrodes 41 and 42 are parallel to the bottom surface of the dielectric
member 40 as seen in Figure 4 (the surface opposed to the member 32) and are distant
from the bottom surface by different distances. This is not innevitable but preferable
from the stand point of easy manufacturing. As for the material of those electrodes,
there are Al, Cr, Au or Ni. It should be noted that, in this embodiment, too, that
the electrodes are not exposed in the portion contributable to the discharging action,
and therefore, no collosion occurs there. For this reason, the high durability can
be provided even if the above mentioned materials are used. It is preferable that
the distance between the embedded electrodes is not less than 1 micron, preferably,
3 - 200 microns in consideration of the durability of insulation.
[0040] The embedded electrodes 41 and 42 are disposed at such a position when the voltage
applied between the embedded electrodes 41 and 42 is increased, a discharge occurs
adjacent to a part of the surface of the dielectric member 40 at a predetermined discharge
starting voltage (on-set voltage). More particularly, when an alternating voltage
not less than the predetermined discharge starting voltage is applied by the alternating
voltage source 14 between the embedded electrodes 41 and 42, strong discharges occur
in the two regions designated by reference numeral 45 which is regions corresponding
to lateral surfaces of the embedded electrode 42 closer to the bottom surface (the
surface substantially normal to a line connecting the electrodes 41 and 42 to which
the alternating voltage is applied) and adjacent to the bottom surface of the dielectric
member 40. By this, positive and negative ions are alternately produced. The discharge
starting voltage is dependent on the distance between the embedded electrodes 41 and
42, the thickness of the dielectric member below the embedded electrodes and the dielectric
constant of the dielectric member, and one skilled in the art determines properly.
[0041] The exposed electrode 43, in this embodiment, is fixed to the bottom surface of the
dielectric member 40, that is, to the surface the discharge occurs by the application
of the alternating voltage. As for the material of the electrode 43, use can be made
with a conductive metal having high durability to collosion and oxidation, for example,
a high fusing point metal such as Ti, W, Cr, Tz, Mo, Fe, Co, Ni, Au and Pt or an alloy
containing one or more of those metals or an oxide thereof. The thickness thereof
is 0.1 - 100 microns, preferably 0.2 - 200 microns. The width thereof is not less
than 1 micron, preferably 10 - 500 microns, and it is less than the width of the embedded
electrode 42. The exposed electrode 43 is disposed adjacent the center between the
discharge regions 45 and at such a position that the discharge starting voltages between
itself and the embedded electrode 41 and between itself and the embedded electrode
42 are both higher than the above described predetermined discharge starting voltage.
More particularly, when the discharge starts in said regions 45 by the application
of the alternating voltage between the embedded electrodes 41 and 42, no electric
discharge occurs between the exposed electrode 43 and the embedded electrode 11 or
between the exposed electrode 43 and the embedded electrode 12. The exposed electrode
43 is disposed adjacent to the discharge regions 45. Here, "adjacent to the discharge
regions", includes the inside or outside thereof, the outside is preferable, but the
inside is possible if it is adjacent to the edge of the discharge region.
[0042] Description will be made as to the relation among the applied alternating voltage
starting discharge between the embedded electrodes 41 and 42, the applied alternating
voltage starting the discharge between the embedded electrode 41 and the exposed electrode
43 and the applied alternating voltage starting the discharge between the embedded
electrode 42 and the exposed electrode 43, in connection with the impedances of the
respective electric circuits in the discharging device 31 of this embodiment.
[0043] Figure 5 illustrates an electric equivalent circuit to the discharging device shown
in Figure 4, wherein Z1 is an impedance corresponding to the electrostatic capacity
of the air existing between the embedded electrodes 41 and 42 in the discharging path
therebetween; Z2 is an impedance corresponding to an electrostatic capacity of the
air existing between the embedded electrode 41 and the exposed electrode 43 in the
discharging path therebetween; Z3 and Z4 are impedances corresponding to electrostatic
capacities of the air existing between the embedded electrode 41 and the exposed electrode
43 in the discharge path therebetween and between the embedded electrode 42 and the
exposed electrode 43 in the discharge path therebetween, respectively. As understood,
there are four possible discharge paths, a Z1 loop containing the impedance Z1, a
Z2 loop containing the impedance Z2, (Z2+Z3) loop containing the impedances Z2 and
Z3 and (Z2+Z4) loop containing the impedances Z2 and Z4. In this equivalent circuit,
if Z1<Z2, Z1<Z2+Z3 and Z1<Z2+Z4 are satisfied, the voltage which is applied between
the embedded electrodes 41 and 42 and which starts the discharge in the respective
discharge paths satisfy:
V1 < V2, V3, V4
where V1 is an applied alternating voltage between the embedded electrodes 41 and
42 which starts the discharge in the Z1 loop;
V2 is an applied alternating voltage between the embedded electrodes 41 and 42 which
starts the discharge in the Z2 loop;
V3 is an applied alternating voltage between the embedded electrodes 41 and 42 which
starts the discharge in the (Z2+Z3) loop;
V4 is an applied alternating voltage between the embedded electrodes 41 and 42 which
starts the discharge in the (Z2+Z4) loop.
[0044] In Figure 4 embodiment, the above described relations in the discharge starting voltages
are realized by providing the exposed electrode 43 adjacent to the center of one 42
of the embedded electrodes. However, the position may be changed under the condition
that the above requirements are satisfied.
[0045] Now, the description will be made with respect to the operation of the discharging
device 1 of this embodiment.
[0046] First, the exposed electrode 43 of the discharging device 31 is placed opposed to
the insulating or photoconductive layer 47 of the member 32 to be charged. Then, an
alternating voltage which is not less than the discharge starting voltage is applied
by the alternating voltage source 44 between the embedded electrodes 41 and 42, while
a bias voltage is applied by the bias voltage source 49 between the exposed electrode
43 and the conductive layer of the member 32 to be charged. The alternating voltage
has 0.5 - 6 KVpp (peak-to-peak), preferably 1 - 4 KVpp, while the DC bias voltage
is 0.2 - 4 KV, preferably 0.5 - 2 KV. Here, it should be noted that an electric insulation
of DC current is established between an AC circuit constituted by the alternating
voltage source 44, the dielectric member 40, the embedded electrode 41 and the embedded
electrode 42 and a DC electric circuit constituted by the DC bias voltage source 49,
the exposed electrode 43 and the conductive layer 48.
[0047] By the application of the alternating voltage from the alternating voltage source
44, the electric discharge occurs in the discharge region 45, whereby positive and
negative ions are produced there.
[0048] For the purpose of better understanding the present invention, an explanation will
be made with respect to the case where there is no exposed electrode 43. When the
alternating voltage is applied between the embedded electrode 41 and 42 without the
exposed electrode 43, the ions are produced in the discharge region 45. However, the
produced ions are bound by the strong electric field formed between the embedded electrodes
41 and 42, so that the ions are produced and disappeared repeatedly in accordance
with the phase change of the alternating voltage, and it is not possible to move the
ions to the member 32 to be charged. In an attempt to extract the produced ions, it
would be considered that a DC bias voltage is applied between the embedded electrode
42 and the conductive layer 48 of the member 32 to be charged. If it is possible by
this method to extract the produced ions of the desired polarity toward the member
32 to be charged, it is preferable from the standpoint of the durability because it
is not necessary to use any exposed electrode. However, the inventors have found and
confirmed that with this structure, it is not possible to move the produced ions toward
the insulating or photoconductive layer of the member 32 to be charged.
[0049] The reason for this is considered as being as follows. For example, it is assumed
that a positive voltage is applied to the embedded electrode 42 relative to the conductive
layer 48 in an attempt to move the positive ions to the member 32. Then, the positive
potential applied to the embedded electrode 42 retains negative ions on the bottom
surface of the dielectric member 40. The negative ions accumulated there in this manner
function to weaken the electric field between the embedded electrode 42 and the member
32 to be charged, necessarily resulting in weakening the effect expected by the application
of the positive voltage.
[0050] Therefore, even if the bias voltage is applied between the embedded electrode 42
and the conductive layer 48, the ions are not extracted toward the member 32 due to
the weakening of the electric field.
[0051] The applied alternating voltage between the embedded electrodes 41 and 42 at the
time when the discharge starts between the exposed electrode 43 and the embedded electrode
41 and between the exposed electrode 43 and the embedded electrode 42, is higher than
the applied alternating voltage between the embedded electrodes 41 and 42 at the time
when the discharge starts adjacent the dielectric member between the embedded electrodes
41 and 42. Therefore, when the discharge starts by the application of the alternating
voltage between the embedded electrode 41 and the embedded electrode 42, no discharge
occurs adjacent the surface of the exposed electrode 43 by the application of the
alternating voltage only by the alternating source 44. However, even in the region
outside the discharge region 45, the exposed electrode 13 is placed in the state under
which the discharge easily occurs in the neighborhood of the discharge region 45,
by the influence by the alternating electric field by the alternating voltage source
44. This state is stimulated by the application of the bias voltage between the exposed
electrode and the conductive layer 48 by the DC bias source 49, and therefore, a discharge
occurs in the neighborhood of the exposed electrode 43 so that positive and negative
ions are produced. This discharge is relatively weak as compared with the discharge
in the discharge region 45. Here, the weakness of the discharge can be discriminated
if the luminous phenomenon is observed by naked eyes. More particularly, the observation
is made when the power is supplied to the DC bias voltage source and when the power
supply thereto is stopped. Because of the weakness of the discharge in the neighborhood
of the exposed electrode 43, the surface of the exposed electrode 43 is not deteriorated
by plasma etching or oxidation which otherwise caused by discharge action. Therefore,
the durability of the discharge device of this embodiment is high. If the exposed
electrode 43 is so disposed that its one or both lateral surfaces are adjacent to
the lateral end of the discharge region 45 and inside thereof, the discharge occurs
also in the neighborhood of the surface of the exposed electrode 43 by the alternating
voltage applied between the embedded electrodes 41 and 42. However, the alternating
voltage to be applied between the embedded electrodes 41 and 42 to start this discharge
is higher than the alternating voltage therebetween for starting the discharge between
the embedded electrodes 41 and 42, and therefore, the strong discharge is concentrated
to the surface of the dielectric member between the embedded electrodes 41 and 42,
and for this reason, the deterioration of the exposed electrode 43 is significantly
small as compared with the conventional discharger.
[0052] In this embodiment, it is not innevitable that the exposed electrode is right below
the center of the embedded electrode 42, but it is preferable that the position of
the exposed electrode 43 is not distant very much from the positions of the embedded
electrodes 41 and 42, in other words, that it is not outside the influence by the
alternating field. More particularly, it is preferable that the exposed electrode
43 is placed at such a position that Voff > Von is satisfied, where Voff is a bias
voltage which starts a discharge in the neighborhood of the exposed electrode 13 without
application of the alternating voltage between the embedded electrodes, and Von is
a bias voltage which starts the discharge in the neighborhood of the exposed electrode
43 with the alternating voltage applied between the embedded electrodes.
[0053] On the other hand, the ions produced in the neighborhood of the exposed electrode
43 are extracted toward the member 32 to be charged by the electric field formed by
the bias voltage applied between the exposed electrode 43 and the member 32 to be
charged by the DC bias voltage source 49, and they are deposited on the insulating
or photoconductive layer 42 surface of the member 32, thus charging the member 32
to the polarity of the extracted ions. In the discharging action, the ions produced
in the strong discharge regions 45 by the application of the alternating voltage between
the embedded electrodes 41 and 42 is hardly utilized for the charging of the member
32, and the ions used for charging the member 32 are mainly in the ions produced by
the relatively weak discharge adjacent to the exposed electrode 43. From this standpoint,
the discharge by the alternating voltage functions rather "cue" for the production
of ions usable to charge or discharge the member 32, than as directly charging or
discharging the member 32.
[0054] In this embodiment, the dielectric member 40 has been described as one integral member,
but this is not always necessary. As an alternative, to or three layers structure
may be employed wherein plural dielectric members are joined between the dielectric
member 40 and/or the top or bottom surface of the embedded electrode 41. In this case,
the materials of the respective layers may be the same or different. When the two
or three layer structure is used, the dielectric layer (the bottom most in the Figure)
which is exposed to the discharge is made of an inorganic material having high durability
to the discharge to assure the life of the dielectric member, while an organic dielectric
member is used for the material of the other dielectric layer were layers. In any
case, the integral structure, two or three layers structure, the thickness of the
dielectric layer below the embedded electrodes is not less than 1 micron and not more
than 500 microns, preferably not less than 3 microns and not more than 200 microns.
[0055] To confirm the effects of the present invention, the comparison has been made between
a discharging device employing the exposed electrode disclosed in U.S. Patent No.
4,155,093 and the discharger of this embodiment, which have been manufactured by the
same materials, more particularly, the dielectric member is of SiO₂, and the exposed
electrode is of Ti, under the conditions that the same charging current is provided,
that is, the same charging effect is provided. The thickness of the dielectric member
between the electrode and the other electrode was 200 microns in the conventional
device, and 10 microns in our device. The alternating voltage was 3 KVpp, 30 KHz in
the conventional device, and 1.3 KVpp, 30 KHz in the device of this embodiment. When
these were actually operated, the remarkable deterioration was observed in approximately
10 - 15 hours of the continuous operation in the conventional device, which resulted
in non-uniform charging of the member. On the contrary, in the device of the embodiment
of this invention, any deterioration of the exposed electrode 43 was observed in 300
hours of the continuous operation. There was no non-uniform charging. Even in the
case where the inside lateral surface of the exposed electrode 43 was in the neighborhood
of and inside the discharge area, the non-uniform discharge was not observed in 300
hours of the continuous operation, and only a slight color change was observed on
the surface of the exposed electrode 43 without any remarkable deterioration.
[0056] In this embodiment, the exposed electrode 43 is directly fixed to the bottom surface
of the dielectric member 40, but this is not always necessary. As an alternative,
it may be a stretched wire electrode disposed between the bottom surface and the surface
of the insulating or photoconductive layer 47 and at such a position as satisfies
the relationship among the discharge starting voltages described in conjunction with
Figure 5. The wire electrode may be fixed to the discharging device 31 adjacent its
longitudinal ends, or may be supported on another member or members.
[0057] Figures 6 and 7 illustrate other embodiments of the discharging device. The embodiment
is essentially the same as Figure 1 embodiment. This will be understood if a vertical
center line O is drawn, and only one half is considered. Therefore, the detailed explanation
is omitted for the sake of simplicity, by assigning the same reference numerals to
the corresponding elements.
[0058] In any of the foregoing embodiments, the voltage applied to the embedded electrodes,
is not limited to an ordinary alternating voltage having a sine wave curve, but a
pulse wave form, a rectangular wave form or a triangular wave form are usable if an
alternating electric field can be formed adjacent the exposed electrode.
[0059] The bias voltage applied between the exposed electrode and the member to be charged
or discharged is not necessarily a DC bias voltage, but it may be an AC bias voltage.
The alternating bias voltage application can be used when the member is discharged
electrically. The above described advantageous effects can be provided even in this
case. What is required for the bias voltage is that such an electric field is formed
between the exposed electrode and the member to be charged or discharged, that the
ions having a predetermined polarity among the positive and negative ions produced
by the discharge, is moved to the member to be charged or discharged, and as a result,
the member is discharged or charged to the predetermined polarity.
[0060] As described in the foregoing, according to the present invention, the embedded electrodes
are covered by the dielectric member, so that the durability of the discharging device
is significantly improved. Further although there is a possibility that it can not
charge or discharge the member because of the charge-up of the dielectric member containing
the electrodes, the provision of the exposed electrode and the bias voltage applied
thereto make it possible to extract the ions. It should be noted that no strong discharge
occurs adjacent to the exposed electrode, so that the durability of the exposed electrode
is high, too. Thus, the discharging device can be provided which efficiently and stably
discharge or charge a member.
[0061] A further improved embodiment will be described. The points of improvement are applicable
to any of the discharging devices described in conjunction with Figures 1, 3, 4, 6
and 7. As a representative, the following description will be made with respect to
the structure of Figure 1 embodiment.
[0062] Figures 8, 9, 10 and 11 illustrate a first improved embodiment, wherein heating elements
20, 21, 22 and 23 are employed for heating the dielectric member 10 in the discharge
device 1. According to the present invention described above, the durability to collosion
of the electrode due to the discharge has been remarkably improved. However, on the
other hand, there is another problem of wetness on the surface of the electrode or
the dielectric member. When the discharge device is not used, the moisture contained
in the ambient air is sometimes deposited on the surface of the dielectric member
and/or the electrode. If this occurs, a problem arises that even if the power is supplied
to the discharger, the discharge does not occur as long as the moisture on the surface
of the electrode and the surface of the dielectric member are removed. For this reason,
when the moisture of the ambient air is high, or when the device is bedewed when it
is cold, it is very difficult to start the discharge immediately after the power supply.
In this embodiment, this problem has been solved by heating the dielectric member
by a heating element.
[0063] In Figures 8 and 9, the heating elements 20 and 21 are embedded in the dielectric
member 10. The heating elements 20 and 21 are of a material which is different from
that of the embedded electrodes 11 and 12, and may be manganin, C, W, NiCr, Ta, Ti,
SiC having a high resistance, which may be evaporated and etched, for example. The
resistance is dependent on the thermal capacity of the discharging device and the
applied voltage, but may be between several ohms and several hundred ohms. To the
heating elements, an alternating or DC voltage is applied which is independent of
the alternating voltage applied between the embedded electrodes 11 and 12 and also
independent of the bias voltage applied to the exposed electrode 13. By the application
of this voltage, the heating elements 20 and 21 produce heat because the resistance
is high. Since the entire surface of the heating element 20 is in contact with the
dielectric member 10, the efficiency of the heat transfer is very high, and therefore,
the dielectric member 10, and therefore, the discharging device 1 is quickly heated
and dried. Thus, the discharging operation is started without difficulty.
[0064] In Figure 9, the embedded electrodes 11 and 12 and the heating element 21 are on
the same plane, so that they are formed simultaneously in the manufacturing process.
As a result, the thickness of the device can be reduced. In order to further improve
the easiness of the manufacturing, the same material is used for the heating element
and for the embedded electrodes.
[0065] In Figures 10 and 11, the heating elements 22 and 23 are mounted to an outside surface
of the dielectric member 10. The heating elements 22 and 23 are directly fixed to
the dielectric member 10 without any material such as bonding agent or the like therebetween.
In Figure 10, it is fixed to the same side as the exposed electrode 13 is provided,
while in Figure 11, it is fixed to the opposite side. The heating elements 22 and
23 may be of manganin, C, W, NiCr, Ta, Ti, SiO or the like evaporated and etched.
Or, an electrically conductive paint containing carbon or metal powder or the like
is mixed in thermo setting resin material solved by a solvent may be used with a printing
technique such as silk printing or the like. An AC or DC voltage is applied to the
heating elements 22 and 23 as in the case of Figures 8 and 9 embodiments to produce
the heating effect. In Figures 10 and 11 embodiments, the heating elements are directly
contacted to the dielectric member surface without the bonding agent or the like therebetween,
the heat transfer from the heating element is efficient.
[0066] According to the first improved embodiment, the heat is transferred efficiently and
quickly to the dielectric member so that the temperature of the surface of the discharging
device, particularly the temperature of the surface where the discharge occurs is
instantaneously increased, so that the moisture on the surface of the dielectric member
is quickly evaporated to enable the discharging operation.
[0067] In the foregoing embodiment, the description is concentrated on the moisture contained
in the air and deposited onto the discharging device. However, another substance can
be deposited. For example, if the substance which decreases the surface resistance
of the dielectric member is deposited to the surface thereof where the alternating
discharge occurs, for example, a production or productions of the discharge such as
ammonia and nitric acid are deposited, the surface resistance of the surface of the
dielectric member is slightly decreased. In the area where the surface resistance
decreases, the alternating discharge becomes remarkably unstable, resulting in non-uniform
discharge. Even in that case, the heating of the dielectric member by the heater is
effective to stabilize the discharging action from the initial stage.
[0068] Now, a second improved embodiment will be described, wherein the discharging device
is provided with the heating element, and wherein a temperature detecting sensor is
provided to detect the temperature of or adjacent the dielectric member with means
for controlling the heat produced by said heating element in accordance with the result
of the detection.
[0069] The sensor and the control means will be described in an example of application to
Figure 11 embodiment. As shown in Figure 12, the dielectric member 10 is provided
with a temperature detecting element (a temperature sensor) 25 at the position shown
in this Figure. On the other hand, the heating element 23 is supplied with power from
the power source 24 for heater. The temperature detecting element 25 produces an output,
which is transmitted to a control device 26. The control device 26 controls the power
supply to the heating element 23 in accordance with the output of the temperature
detecting element 25, so as to control the amount of heat produced by the heating
element 23 which is a heating resistance.
[0070] The operation of the temperature detection and the heat control will be described.
The heating element 23 heats the dielectric member 10 so that the temperature adjacent
the discharging surface 10a reaches to such a temperature as to provide stable and
uniform discharge. At this time, the temperature of the dielectric member 10 or the
temperature adjacent the discharge surface 10a of the dielectric member 10, is detected
by the temperature detecting element 25. If it detects the temperature which provides
the stable and uniform discharge, the control device 26 produces a signal to stop
the power supply to the heating element from the power source 24, or the current to
the heater is controlled so that the temperature of the discharging surface or the
temperature adjacent to it is maintained at the proper temperature. The control circuit
may be of a known type.
[0071] Figure 13 is a graph showing the change in the temperature of the dielectric member
surface from the start of heating to the set temperature for the stable discharge
in the discharge device having the temperature detecting element 25 and the control
device 26 and in the device without it. The curve b represents the case of the discharging
device without the heat control, and it exhibit that a period Tb is required until
the stable set temperature is reached (stabilized state in the surface temperature).
If the ambient temperature is higher or lower, the temperature at the time of Tb is
significantly offset from the set temperature, as indicated by the broken curves p′
and b′′. Thus, without the control circuit, the heating element 23 is supplied with
a constant current providing a constant quantity of heat, and therefore, a longer
period of time is required until the stable state is reached, and in addition, the
surface temperature is deviated from the set temperature if the ambient condition
changes or due to the unavoidable variation of the heating elements. For this reason,
it is not possible to provide the stable discharge states under all ambient conditions.
With the discharging device shown in Figure 12, the surface temperature of the dielectric
member 10 is actually detected, and the quantity of heat produced by the heating element
23 is controlled by the control device 26 in response to the detection. Therefore,
independently of the change in the ambient conditions and the unavoidable variation
of the heating elements, it is possible to maintain the surface temperature at the
set temperature which is desirable to stabilize the discharge. Also, since the quantity
of heat produced can be controlled, it is possible that the electric current is selectively
supplied or stopped, or controlled so as to provide a larger current (larger quantity
of heat) at the initial stage of the heating and so as to control the current (the
quantity of heat) after the set temperature is detected to maintain the set temperature.
Therefore, as shown in Figure 13 by reference
a, the shorter period Ta is sufficient to reach the set temperature. In this manner,
the warming or waiting time required after the power supply is rendered on as in the
case of the discharging device used with a copying machine or an electrostatic printer
or the like, can be reduced, and therefore, the time required until the image forming
operation is enabled, can be reduced.
[0072] The heating element 23 shown in Figure 12 is the resistor heater utilizing the heat
production due to the resistance loss, but another heating element is usable, such
as a dielectric member utilizing a dielectric loss.
[0073] The position of the heating member is not limited to that shown in Figure 12, but
it may be those shown in Figures 8, 9 and 10. In any case, by locating the heating
element close to the discharge region under the condition that it does not influence
the discharge between the embedded electrodes 11 and 12, the surface temperature of
the discharge region can be quickly increased. Particularly, as shown in Figures 8
and 9, it is preferable that the heating element is embedded in the dielectric member
10, since then, the heating element is protected by the dielectric member, so that
the possible deterioration of the heating element due to the moisture or the discharge
productions does not occur, whereby the durability and the reliability of the heating
element is remarkably increased.
[0074] Figure 14 shows the discharging device wherein one of the electrodes functions also
as a heating element. In the embodiment shown, the exposed electrode 13 is produced
from a resistor, and the heat produced by the current through the resistor is used.
As an alternative, one or more of the embedded electrodes are utilized also as the
heating element. It should be noted that in the case of Figure 14, the heating element
can be placed most closely to the discharge region, and therefore, the necessary portion
of the dielectric member can be quickly heated so that small consumption of electric
power is sufficient. Therefore, this arrangement is most efficient from this standpoint.
[0075] The position of the temperature detecting element 25 is not limited to that shown
in Figure 12, but it may be disposed at a such a position as the temperature at least
at the discharge region is correctly detected. Also, the temperature detecting element
25 may be of contact or non-contact type.
[0076] As described in the foregoing, according to the second improved embodiment of the
present invention, the stable and uniform discharge can be started quickly and efficiently
under wide ambient conditions. When the heating element is always supplied with the
electric power, the discharging device which is capable of discharging by a small
current, and therefore, with smaller power consumption, has to consume larger power.
However, according to this embodiment, the current supply to the heater is properly
controlled in accordance with the output of the temperature detecting element, so
that the power consumption can be reduced.
[0077] A further improved embodiment of the present invention will be described. When the
member is to be charged using the above described discharging device, the ambient
conditions around the discharge region can not be neglected in order to obtain a uniform
discharge. Third, fourth, fifth and sixth improved embodiment which are going to be
described are capable of providing a constant amount of charging to the member under
any conditions, that is, without being influenced by the change in the ambient conditions.
[0078] Figure 15 illustrates a third improved embodiment of the present invention, wherein
the voltage level of the alternating voltage applied between the embedded electrodes
11 and 12 is controlled to provide the constant charging current. That is, when the
ions of the desired property are moved to the member 2 to be charged by the application
of the bias voltage, the charging current is detected by a current detecting circuit
27, in response to which a constant current control circuit 28 controls the voltage
level provided by the alternating voltage source 14. By changing the alternating voltage
level, the amount of discharge between the embedded electrodes 11 and 12 can be changed.
Therefore, it is possible to control the alternating voltage level so as to maintain
the charging current to the member to be charged at a predetermined level. Then, even
if the ambient moisture or the temperature adjacent to the discharge region changes,
that is, if a change occurs in any factor which can influence the ion production amount,
the amount of produced ions does not change, whereby the variation of the charging
current can be removed.
[0079] Figure 16 shows the variation in the charging current resulting from the variation
of the temperature of the discharge surface when the charging current is not stabilized.
The dielectric member 10 of the charging device 1 was of SiO₂ having the thickness
of 10 microns, and the charging device 1 and the discharge region 15 were heated by
an unshown heating element from the backside of the dielectric member 10. The alternating
voltage used was 2 KV (peak-to-peak) having the frequency of 30 KHz. The bias voltage
applied was ±1 KV. The distance between the exposed electrode 13 and the member 2
was set to be 1 mm. The charging current to a unit area (1 cm²) of the member 2 was
measured. As will be understood from this Figure, when the temperature is increased
from 50 - 200 °C, the charging current increases to approximately 1.5 - 2.0 times.
This significant increase of the charging current resulting from the increase of the
discharge surface temperature is peculiar to the charging device of this type.
[0080] Thus, it has been found that the charging current significantly varies, when the
discharge action is influenced by the ambient conditions such as moisture or the like
(not heated), when a heater is used to stabilize the discharge or when the temperature
is increased for the purpose of reducing production of ozone.
[0081] Therefore, without the charging current control of Figure 15, the charging device
is used in an electrophotographic copying machine or in an electrostatic recording
machine, the charging current is significantly unstable.
[0082] Figure 17 shows the relation between the alternating voltage and the discharge surface
temperature according to this embodiment wherein the charging current is controlled.
As will be understood, when the charging current is set ±4 micro ampere/cm², the change
of the alternating voltage responsive to the temperature change varies very widely,
that is, from approx. 2.1 KVpp at 50 °C - 1.7 KVpp at 200 °C. Therefore, to accomplish
the constant current, the alternating voltage is required to be controlled in this
wide range. Thus, it is understood that the discharging device of this type is sensitive
to the temperature change which is not a problem in the conventional corona discharging
device, since it leads to the change in the charging current, and that some means
for providing the constant current is important in this discharging device.
[0083] Figure 18 is a block diagram illustrating the alternating voltage source, the bias
voltage source, the detecting circuit and the control circuit used with the charging
device of Figure 15. In response to the charging current detected by the current detecting
circuit 27, the rate of amplification of an AC amplifier circuit in the alternating
voltage source 14 is controlled by the control circuit 28, so that the output voltage
of the alternating voltage source 14 is controlled so as to provide a predetermined
constant charging current.
[0084] The means for making the charging current constant, is not limited to this example,
but fandamentally, the charging device may be equipped with any means for detecting
the charging current to the member to be charged and for controlling, in response
to the detection, the alternating voltage to make the charging current constant independently
of the discharge conditions. The constant current control is rather peculiar to the
charging device of this type, wherein the quantity of produced ions is controlled
under a constant external electric field by the bias voltage so as to provide the
constant charging current, and therefore, it is fandamentally different from the constant
current control method in a conventional corona charging device, wherein the corona
discharging voltage is controlled.
[0085] In Figure 18, a constant voltage control circuit is used in the bias voltage source
19 to make the bias voltage constant, but this is not always necessary.
[0086] Figure 19 illustrates a fourth improved embodiment of the present invention, wherein
the frequency of the alternating voltage applied between the embedded electrodes 11
and 12 is controlled to provide the constant charging current. That is, when the ions
of the desired property are moved to the member 2 to be charged by the application
of the bias voltage, the charging current is detected by a current detecting circuit
27, in response to which a constant current control circuit 28 controls the frequency
provided by the alternating voltage source 14, more particularly the oscillating frequency
of the AC oscillating circuit therein. By changing the alternating voltage level,
the amount of discharge between the embedded electrodes 11 and 12 can be changed.
Therefore, it is possible to control the alternating voltage level so as to maintain
the charging current to the member to be charged at a predetermined level. Then, even
if the ambient moisture or the temperature adjacent to the discharge region changes,
that is, if a change occurs in any factor which can influence the ion production amount,
the amount of produced ions does not change, whereby the variation of the charging
current can be removed.
[0087] Figure 20 shows the relation between the frequency of the alternating voltage and
the discharge surface temperature according to this embodiment wherein the charging
current is controlled. As will be understood, when the charging current is set ±4
micro ampere/cm², the change of the frequency of alternating voltage responsive to
the temperature change varies very widely, that is, from approx. 35 KHz at 50 °C to
20 - 25 KHz at 200 °C. Therefore, to accomplish the constant current, the frequency
of the alternating voltage is required to be controlled in this wide range. Thus,
it is understood that the discharging device of this type is sensitive to the temperature
change which is not a problem in the conventional corona discharging device, since
it leads to the change in the charging current, and that some means for providing
the constant current is important in this discharging device.
[0088] The means for making the charging current constant, is not limited to this example,
but fandamentally, the charging device may be equipped with any means for detecting
the charging current to the member to be charged and for controlling, in response
to the detection, the frequency of the alternating voltage to make the charging current
constant independently of the discharge conditions. The constant current control is
rather peculiar to the charging device of this type, similarly to the voltage control
case, wherein the quantity of produced ions is controlled under a constant external
electric field by the bias voltage so as to provide the constant charging current,
and therefore, it is fandamentally different from the constant current control method
in a conventional corona charging device, wherein the corona discharging voltage
is controlled.
[0089] In Figure 19, a constant voltage control circuit is used in the bias voltage source
19 to make the bias voltage constant, but this is not always necessary.
[0090] Figure 21 illustrates a fifth improved embodiment of the present invention, wherein
the voltage level of the bias voltage applied between the exposed electrodes 13 and
the member 2 is controlled to provide the constant charging current. That is, when
the ions of the desired property are moved to the member 2 to be charged by the application
of the bias voltage, the charging current is detected by a current detecting circuit
27, in response to which a constant current control circuit 28 controls the voltage
level provided by the bias voltage source 19, more particularly, the P.W.M. circuit
(pulse width control circuit) therein as shown in Figure 22. Therefore, it is possible
to control the bias voltage level so as to maintain the charging current to the member
to be charged at a predetermined level. Then, even if the ambient moisture or the
temperature adjacent to the discharge region changes, that is, if a change occurs
in any factor which can influence the ion production amount, the amount of produced
ions does not change, whereby the variation of the charging current can be removed.
[0091] Figure 23 shows the relation between the bias voltage and the discharge surface temperature
according to this embodiment wherein the charging current is controlled. As will be
understood, when the charging current is set ±4 micro ampere/cm², the change of the
alternating voltage responsive to the temperature change varies very widely, that
is, from approx. ±1 KV at 50 °C to ±700 - 800 V at 200 °C. Therefore, to accomplish
the constant current, the bias voltage is required to be controlled in this wide range.
Thus, it is understood that the discharging device of this type is sensitive to the
temperature change which is not a problem in the conventional corona discharging device,
since it leads to the change in the charging current, and that some means for providing
the constant current is important in this discharging device.
[0092] The means for making the charging current constant, is not limited to this example,
but fandamentally, the charging device may be equipped with any means for detecting
the charging current to the member to be charged and for controlling, in response
to the detection, the alternating voltage to make the charging current constant independently
of the discharge conditions. The constant current control is rather peculiar to the
charging device of this type, similarly to the voltage or frequency control case,
wherein from the quantity of produced ions desired quantity is extracted by the bias
voltage so as to provide the constant charging current, and therefore, it is fandamentally
different from the constant current control method in a conventional corona charging
device, wherein the corona discharging voltage is controlled.
[0093] In the fourth or fifth improved embodiments, the description has been omitted as
to the variation in the charging current when the constant current control is not
employed. However, the similar state results when the constant current control is
not used in any of those embodiments.
[0094] Figure 24 illustrates a sixth improved embodiment which is an extension of the fifth
embodiment. In the sixth embodiment, the bias voltage applied by the bias voltage
source 19 is controlled within a predetermined range in response to the charging current
detected by the detecting circuit 27 to provide the constant charging current, and
wherein when the control is necessary beyond the range, the voltage level or the frequency
of the alternating voltage supplied by the alternating voltage source 14 between the
embedded electrodes 11 and 12 is controlled to provide the constant charging current.
[0095] In the device shown in Figure 24, the bias voltage is applied to the exposed voltage
13 so as to extract the positive ions. The charging current is detected by the current
detecting circuit 27, and in response to the detected charging current, the bias voltage
by the bias voltage source 19 is controlled by the control circuit 28, so that the
external electric field is changed to maintain the charging current at a predetermined
constant level.
[0096] In this embodiment, there is provided an upper limit to the controllable range of
the bias voltage. When the predetermined charging current is not reached even if the
bias voltage is increased up to this upper limit by the control circuit 28, a further
control is performed by controlling the voltage level by the alternating voltage source
14 to change the AC electric field between the embedded electrodes 11 and 12, thus
making the charging current reach the predetermined level without further changing
the external electric field (the bias voltage). More detailed explanation will be
made.
[0097] Figure 25 is a block diagram of the device used with the Figure 24 device, which
contains the alternating voltage source 14, the bias voltage source 19, the detecting
circuit 27 and the control circuit 28. The bias voltage source 19 includes P.W.M.
circuit (pulse width control circuit) 191 to which the output of the constant current
control circuit 28 is supplied, an inverter circuit 192 and a rectifying circuit 193.
The alternating voltage source 14 includes an AC oscillating circuit 141, an AC amplifier
circuit 142 controlled by the constant current control circuit 28 and an AC transformer
143. This is the same as in the devices of Figures 18, 19 and 22.
[0098] In operation, in response to the charging current detected by the current detecting
circuit 27, the control circuit 28 controls the P.W.M. circuit 191 in the bias voltage
source 19 to make it control the pulse width so as to control the output voltage of
the bias voltage source 19 so as to provide the constant charging current.
[0099] If a situation occurs wherein the bias voltage is raised up to a predetermined upper
limit, but the predetermined charging current is still not provided, the control circuit
28 then controls the rate of amplification in the AC amplifier circuit 142 in the
alternating voltage source 14 to control the output voltage of the alternating voltage
source 14 to provide the predetermined level of the charging current.
[0100] In this manner, the constant and predetermined charging current is provided.
[0101] As a result, when the discharge action changes due to the ambient moisture variation
or the temperature variation adjacent the exposed electrode, that is, if the quantity
of ion production adjacent the exposed electrode 13 varies, the variation in the charging
current can be removed by the combined control of the external electric field by changing
the bias voltage and the control of the AC electric field in the AC discharge region
15 by changing the alternating voltage.
[0102] Referring to Figure 26, the constant current control of this embodiment will be further
described.
[0103] As will be understood from Figure 26, when a certain level of the bias voltage is
applied, the charging current varies upon variation of the temperature around the
discharging device. The variation of the charging current is detected, and the bias
voltage is controlled so as to maintain the charging current at a predetermined level.
If, however, the situation occurs wherein the charging current does not reach the
predetermined even if the bias voltage is raised up to the upper limit shown in this
Figure, then the alternating voltage is controlled to change the discharge at the
discharge region 15 so as to increase the ions produced adjacent the exposed electrode
to compensate the charging current.
[0104] The control of this embodiment is particularly advantageous, when the charging current
is remarkably reduced for some reasons, for example, because of low resistance substance
being deposited onto the dielectric member surface, thus narrowing the discharge area
15 remarkably. If the control is made only by the bias voltage control, the bias voltage
will become, in such a situation, so high that electric discharge occurs between the
exposed electrode and the member to be charged. By this embodiment, this can be avoided,
and in addition, the charging current can be made stabilized since, the alternating
voltage is further controlled.
[0105] In Figure 26, as an example, the control against the variation in the temperature
adjacent the discharging device. But this embodiment is not limited to the temperature,
but can meet the influence of the ambient moisture, contamination of the discharging
device, the variation in the charging current resulting from the property change in
the member to be charged or any other factors, and can stabilize the charging.
[0106] The detailed structure of control are not limited to those described above in this
embodiment. As an alternative, in place of controlling the AC voltage, an AC oscillating
circuit 141 may be controlled so that the frequency thereof is changed, with the same
advantageous effects. In the frequency control of the alternating voltage means the
number of discharging action in the discharge region 15 per unit time is controlled.
The charging current may be stabilized by changing the discharging action in this
way.
[0107] In any event, the constant current control of this embodiment, similarly to the above
described constant current control methods, is peculiar to the discharging device
of this type, and is fandamentally different from the corona discharging voltage control
in the conventional corona discharging devices.
[0108] In the descriptions of the third, fourth, fifth and sixth improved embodiments, the
discharging device of Figure 1 is taken as a representative but it is understood that
the above described control of the alternating voltage, the frequency of the alternating
voltage or the bias voltage for the purpose of the constant charging current is applicable
to the discharging devices shown in Figures 3, 4, 6 and 7. Also, the description has
been made with respect to the case where the member 2 is electrically charged, but
it is understood that the same applies to the case where the member 2 is electrically
discharged.
[0109] Next, the description will be made with respect to a modification of the structure
of the dielectric member 10 in which the electrodes 11 and 12 are embedded. This modified
embodiment is advantageous in that the durability, particularly the durability of
the dielectric member is enhanced.
[0110] In this embodiment, the dielectric member 10 has a structure which is fandamentally
similar to that of Figure 1, but has a multi-layered structure.
[0111] Referring to Figure 27, the discharging device 1 includes a first dielectric member
30, on the surface of which there are at least two electrodes, i.e., a first electrode
11 and a second electrode 12 connected to an AC voltage source 14. The first and second
electrodes 11 and 12 are covered by a second dielectric member 31 so as to constitute
embedded electrodes in the dielectric member. On the surface of the second dielectric
member 31, there is an exposed electrode 13 as a third electrode connected to a DC
bias voltage source 19. The feature of this embodiment is in that the second dielectric
member 31 is formed by two different layers of inorganic dielectric films.
[0112] In consideration of the easy manufacturing and the durability of the surface to the
discharge, it is preferable that the inner layer is of a material which is easy for
film formation, while the outside layer is of a material higher durable to the discharge.
The inorganic dielectric materials have a tendency that the materials which are easily
formed into a film has the low durability to discharge, while the materials which
is not easy to form into a film has the high durability to discharge, and therefore,
the above described preferable selection is possible.
[0113] The detailed description will be made as to the structure and materials of this embodiment.
[0114] In Figure 27, the material of the first dielectric member 30 which is a supporting
dielectric member is not limited to particular materials, but may be any solid dielectric
material, such as a glass substrate, a ceramic substrate and resin material substrate
or the like. As for the first electrode 11, the second electrode 12 and the third
electrode 13, those described together with Figure 1 are usable.
[0115] The second dielectric film 31 covering the first and second electrodes 11 and 12
has a thickness not less than 1 micron and not more than 500 microns, preferably not
less than 3 microns and not more than 200 microns of an inorganic dielectric material
having a high resistance to the discharge, such as glass, ceramic, an oxide (SiO₂,
MgO, Al₂O₃, Ta₂O₅) (silicon nitride, aluminum nitride and amorphous silicon which
are formed by evaporation, sputter filming method, CVD method or the like).
[0116] The inside layer 311 is made of the material among the above materials that is highest
dielectric strength and is of good property of contact to the supporting substrate
30, and further that is relatively easily formed into film. The thickness thereof
is selected to provide the sufficient dielectric strength. The outside layer 312 is
made of the material among the above described material that is most durable to the
discharge and that has a smooth surface with high surface resistance. Of those materials,
the durability to discharge are in the following order:
Al₂O₃, MgO, SiO₂, glass
[0117] The order of the easy film formation is the opposite.
[0118] In operation, an alternating voltage is applied between the first and second electrode
11 and 12 by the alternating voltage source 14, and the alternating discharge occurs
in the discharge region 15 adjacent to the surface of the second dielectric member
31. The strength of the electric field in the discharge region 15 is stronger at the
central portion, and it becomes weaker toward the outside. The surface at which the
alternating discharge occurs is the surface of the outside layer 312 having the high
durability to the discharge, and the inside layer 31 provides sufficient durability
to dielectric strength, and therefore, the deterioration of the dielectric member
by the discharge does not proceed, whereby the stabilized AC discharge continues for
a long period of time.
[0119] The discharging device of this embodiment is compared with a discharging device having
a single-layered dielectric member.
[0120] As for the single layered dielectric member of an inorganic material, the second
dielectric member 31 was formed by SiO₂ having 10 microns thickness by spattering,
and continuous discharging operation was performed with an alternating voltage of
sine wave having 1.7 KVpp and 35 KHz. After 150 - 200 hours operation, the dielectric
film was etched by the discharge plasma and finally, the insulation brake down occurred.
[0121] As for the device of the present invention, the second dielectric member 31 was made
of SiO₂ film having 9 microns thickness, and Al₂O₃ film was formed thereon with the
thickness of 1 micron. The similar continuous discharging operation was performed.
The stabilized discharging action continued for 500 - 600 hours.
[0122] As will be understood, according to this embodiment of the present invention, the
durability is remarkably increased by forming a very thin layer of inorganic dielectric
film having a high durability to discharge and having a property of difficult film
formation, on an inorganic dielectric film having a property of easy film formation.
Thus, the stabilized and uniform discharging or charging operation is possible for
a long period of time.
[0123] A further embodiment will be described which is featured by the second dielectric
member.
[0124] Referring to Figure 28, the second dielectric member 31 includes an inside layer
of organic dielectric film 313 and an outside layer of inorganic dielectric film 314.
As discussed hereinbefore, the durability is very low if only the organic dielectric
film only is used as the dielectric film. However, by forming the inside layer by
organic dielectric film 31 having the thickness to provide sufficient durability to
the insulation brake down and by forming an outside layer on the outside surface of
the organic dielectric film 31 by an inorganic dielectric film 32 having a high durability
to discharge with a required minimum thickness, the durability is remarkably increased,
which has not been possible when only the organic dielectric film only is used.
[0125] The second dielectric film 31 covering the first and second electrodes 11 and 12
has a thickness not less than 1 micron and not more than 500 microns, preferably not
less than 3 microns and not more than 200 microns of an inorganic dielectric material
having a high resistance to the discharge, such as glass, ceramic, an oxide (SiO₂,
MgO, Al₂O₃, Ta₂O₅) (silicon nitride, aluminum nitride and amorphous silicon which
are formed by evaporation, sputter filming method, CVD method or the like).
[0126] The inside dielectric layer film 313 which covers the first and second electrodes
11 and 12 and which provides dielectric strength has a thickness not less than 1 micron
and not more than 500 microns, preferably not less than 3 microns and not more than
200 microns of organic dielectric material such as polyimide, polyamide, epoxy resin,
Teflon (trade name) and silicone resin, which is formed into a film by a dipping method,
spin coating method or evaporation method or the like. The inorganic dielectric film
314, that is, the outside layer which provides the durability to discharge has a minimum
required thickness for the purpose of protection from the discharge plasma etching,
more particularly 0.1 micron - 5 microns of glass, ceramic, SiO₂, MgO, Al₂O₃, silicon
nitride or aluminum nitride which is formed into a film of that thickness by evaporation,
sputtering, CVD method, dipping method or the like. The first, second and third electrode
and the first dielectric member may be the same as those described in conjunction
with Figure 27.
[0127] In operation, an alternating voltage is applied between the first and second electrode
11 and 12 by the alternating voltage source 14, and the alternating discharge occurs
in the discharge region 15 adjacent to the surface of the dielectric member 31. The
strength of the electric field in the discharge region 15 is stronger at the central
portion, and it becomes weaker toward the outside. The surface at which the alternating
discharge occurs is the surface of the outside inorganic layer 312 having the high
durability to the discharge, and the inside layer 31 provides sufficient durability
to dielectric strength, and therefore, the deterioration of the dielectric member
by the discharge does not proceed, whereby the stabilized AC discharge continues for
a long period of time.
[0128] The discharging device of this embodiment is compared with a discharging device having
a second dielectric member of organic material.
[0129] As for the single layered dielectric member of an organic material, the second dielectric
member 31 was formed by polyimide resin having 20 microns thickness by dipping, and
continuous discharging operation was performed with an alternating voltage of sine
wave having 2 KVpp and 30 KHz. After several - several tens hours operation, the
dielectric film was etched by the discharge plasma and finally, the insulation brake
down occurred.
[0130] As an example of this embodiment, the organic dielectric film was made of polyimide
resin having the thickness of 17 microns, and SiO₂ film having a thickness of 3 microns
as the inorganic dielectric film 314 was sputtered thereon. The similar continuous
discharging operation was possible for 70 - 100 hours with stability.
[0131] Thus, according to this embodiment, a very small thickness of inorganic dielectric
member which is difficult to form into a film is applied on the organic dielectric
film, by which the durability is significantly improved. In place of vacuum method
for forming the SiO₂ film, it is possible to form the film by coating method, and
in this method, the discharging device can be produced quickly and at low cost.
[0132] Thus, the stabilized and uniform discharging or charging operation is possible for
a long period of time.
[0133] In addition, the organic dielectric member is easy to form into a film, and the inorganic
dielectric member may be of very small thickness, and therefore, the manufacturing
is easy.
[0134] A further embodiment will be described which is featured by the second dielectric
member, again.
[0135] Referring to Figure 29, the second dielectric member 31 includes an inside layer
315, an intermediate layer 316 and an outside layer 317 which are all of inorganic
dielectric materials. The inside layer 315 is of a material which is easily formed
into a film, the intermediate layer 316 is of a material exhibiting high durability
to the discharge, and the outside layer 317 is of a material having a high resistance.
[0136] The inorganic dielectric materials have a tendency that the durability to discharge
is low if it is easy to form into a film, while the durability to the discharge is
high if it is difficult to form into a film. In view of this tendency, the inside
layer 315 has a sufficient thickness to provide the satisfactory durability to the
discharge, while the intermediate layer 316 may have a relatively small thickness
to provide the satisfactory durability to the discharge. Also, the high resistance
outside layer 317 may be thicker than the inside layer 315.
[0137] The dielectric film 31 covering the first and second electrodes 11 and 12 has a thickness
not less than 1 micron and not more than 500 microns, preferably not less than 3 microns
and not more than 200 microns of an inorganic dielectric material having a high resistance
to the discharge, such as glass, ceramic, an oxide (SiO₂, MgO, Al₂O₃, Ta₂O₅) (silicon
nitride, aluminum nitride and amorphous silicon which are formed by evaporation, sputter
filming method, CVD method or the like).
[0138] The dielectric member includes three layers.
[0139] The inside layer 315 is made of the material among the above materials that is of
good property of contact to the supporting substrate 30, and further that is relatively
easily formed into film. The thickness thereof is selected to provide the sufficient
dielectric strength. The intermediate layer 315 of a material which exhibits significantly
high resistance to the discharge, with minimum thickness. The outside layer 317 is
made of the material among the above described material that is most durable to the
discharge and that has a smooth surface with high surface resistance. Of those materials,
the durability to discharge are in the following order:
Al₂O₃, MgO, SiO₂, glass
[0140] Thus, the contradictory properties are shown between the easy film formation property
and the durability to discharge, but as to the resistance, there is no such tendency,
and SiO₂ and silicon nitride exhibit a high resistance. Therefore, as for the outside
layer 317, a material which simply shows a high resistance may be selected among the
inorganic dielectric member. As for the first, second and third electrodes and the
first dielectric member, those described in conjunction with Figure 27 are usable.
[0141] In the device constructed in the above described manner, an alternating voltage is
applied between the first and second electrodes 11 and 12 by the alternating voltage
source 14, by which the alternating discharge occurs in the discharge region 15 adjacent
the surface of the dielectric member 31. The strength of the electric field in the
discharge region 15 is strong at the central position and decreases gradually toward
outside. Since, the inside layer 315 provides sufficient dielectric strength, and
since the intermediate layer 316 provide the high durability to discharge, the durability
of the device is remarkably increased. With respect to the outside layer 317, those
materials among the above mentioned that have a relatively low surface resistance
result in unstable alternating discharge occurring adjacent the surface of the dielectric
member, and therefore, uniform discharging can not be maintained. This fact has been
found by the inventors. On the basis of this finding, it is preferable in order to
stabilize the discharge that the surface resistance is not less than 10¹¹ ohm, more
preferably not less than 10¹² ohm. However, some material exhibits a large variation
of the surface resistance depending on various conditions of film formation, when
Al₂O₃, for example, is sputtered. In view of this, it is preferable to select SiO₂
or silicon nitride as the material for the outside layer, which provides a stable
high resistance. Both of them exhibits stably the high resistance of approximately
10¹⁴ ohm.
[0142] The discharging device of this embodiment is compared with a discharging device having
a single-layered dielectric member.
[0143] As for the single layered dielectric member of an inorganic material, the second
dielectric member 31 was formed by SiO₂ (which is relatively easy to form into a film)
having 10 microns thickness by spattering, and continuous discharging operation was
performed with an alternating voltage of sine wave having 1.7 KVpp and 35 KHz. After
150 - 200 hours operation, the dielectric film was etched by the discharge plasma
and finally, the insulation brake down occurred.
[0144] As for the device of the present invention, the second dielectric member 31 was made
of SiO₂ film having 7 microns thickness as the inside layer 315, Al₂O₃ film was formed
thereon with the thickness of 1 micron as the intermediate layer 316 and SiO₂ film
of 2 microns was sputtered as the outside layer. The similar continuous discharging
operation was performed. The stabilized discharging action continued for 500 - 600
hours.
[0145] As will be understood, according to this embodiment of the present invention, the
durability is remarkably increased by forming the inorganic second dielectric member
as three layers. Thus, the stabilized and uniform discharging or charging operation
is possible for a long period of time.
[0146] In addition, the relatively thick inside layer is easy to form into a film, and the
intermediate and outside layers may be thin, so that the manufacture is easy.
[0147] In addition, the relatively thick inside layer is easily formed into a film, while
the intermediate and outside layers may be satisfactorily formed into a thin film,
and therefore, the dielectric member is easily manufactured.
[0148] As described in the foregoing in conjunction with Figures 27, 28 and 29, the dielectric
member is formed in a multi-layered structure, the durability of the dielectric member
is made longer, so that the entire performance of the device is improved.
[0149] In the above described embodiments, the structure of Figure 1 is taken as a representative,
but those embodiments are applicable to the second dielectric member of the discharging
devices of Figures 6 and 7. Also, it is applicable to the discharging device of Figure
4, more particularly, the second dielectric member of the above described embodiments
is applicable to the part of the dielectric member between the embedded electrode
42 and the exposed electrode 43.
[0150] As described in the foregoing, according to the present invention, a discharging
device which is small in size and which is not easily contaminated, with a high durability,
can be provided. Further, it can be operated stably and uniformly to effect the electric
charging or discharging without being influenced by the change in the ambient conditions.
[0151] As an example of the temperature control described hereinbefore, the temperature
around the discharge surface is preferably maintained at 70 °C under the condition
that the ambient temperature and humidity is 30 °C and 90 %, respectively. If the
ambient temperature is lower, the controlled temperature is also decreased, but not
below 40 °C.
[0152] While the invention has been described with reference to the structures disclosed
herein, it is not confined to the details set forth and this application is intended
to cover such modifications or changes as may come within the purposes of the improvements
or the scope of the following claims.