(19)

(11)

EP 0 238 665 A1

(12)

(43) Date of publication: 30.09.1987 Bulletin 1987/40 (21) Application number: 86902027.0 (22) Date of filing: 27.03.1986

(51) International Patent Classification (IPC):  H01L 21/ 52( . ) H01L 21/ 60( . ) H01L 23/ 48( . ) H01L 21/ 58( . ) H01L 21/ 603( . ) H01L 29/ 744( . ) (86) International application number: PCT/JP1986/000145 (87) International publication number: WO 1987/001866 (26.03.1987 Gazette 1987/07)

(84) Designated Contracting States: DE FR GB (30) Priority: 20.09.1985 JP 19850209407 (71) Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA Tokyo 100 (JP)	(72) Inventor: HAGINO, Hiroyasu Mitsubishi Denki K.K. Itami-shi Hyogo-ken 664 (JP) (74) Representative: Lawson, David Glynne, et al  MARKS & CLERK, 57-60 Lincoln's Inn Fields London WC2A 3LS London WC2A 3LS (GB)