(19)

(11)

EP 0 243 378 A1

(12)

(43) Date of publication: 04.11.1987 Bulletin 1987/45 (21) Application number: 86905039.0 (22) Date of filing: 21.07.1986

(51) International Patent Classification (IPC):  H01L 21/ 20( . ) (86) International application number: PCT/US1986/001564 (87) International publication number: WO 1987/002509 (23.04.1987 Gazette 1987/09)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 17.10.1985 US 19850788426 (71) Applicant: HOLOBEAM, INC. NJ 07450, Ridgewood (US)	(72) Inventor: COOK, Melvin, S. Saddle River, NJ 07458 (US)