(19)
(11) EP 0 247 153 A1

(12)

(43) Date of publication:
02.12.1987 Bulletin 1987/49

(21) Application number: 86907168.0

(22) Date of filing: 12.11.1986
(51) International Patent Classification (IPC): 
G03F 7/ 40( . )
(86) International application number:
PCT/US1986/002441
(87) International publication number:
WO 1987/003387 (04.06.1987 Gazette 1987/12)
(84) Designated Contracting States:
AT BE CH DE FR GB IT LI LU NL SE

(30) Priority: 27.11.1985 US 19850802514
29.01.1986 US 19860823942
27.06.1986 US 19860879385

(71) Applicant: MACDERMID, INCORPORATED
Waterbury, CT 06708 (US)

(72) Inventors:
  • GRUNWALD, John, J.
    New Haven, CT 06515 (US)
  • SPENCER, Allen, C.
    Naugatuck, CT 06770 (US)

(74) Representative: Bankes, Stephen Charles Digby 
BARON & WARREN 18 South End Kensington
London W8 5BU
London W8 5BU (GB)

   


(54) THERMALLY STABILIZED PHOTORESIST IMAGES