PROCEDURE FOR MANUFACTURING A PIEZORESISTIVE RESISTANCE ELEMENT AND APPARATUS APPLYING SAID PROCEDURE, AND PICK-UP MANUFACTURED BY THE PROCEDURE, IN PARTICULAR A PRESSURE PICK-UP OR EQUIVALENT - Patent 0253860

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EP 0 253 860 A1

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(43)	Date of publication:
	27.01.1988 Bulletin 1988/04

(21)	Application number: 87900813.0

(22)	Date of filing: 09.01.1987

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International Patent Classification (IPC):

H01L 21/ 205^{( . )}
G01L 9/ 00^{( . )}
H01C 17/ 075^{( . )}
H01L 21/ 268^{( . )}

G01L 1/ 22^{( . )}
H01C 10/ 10^{( . )}
H01L 21/ 263^{( . )}
H01L 29/ 84^{( . )}

(86)	International application number:
	PCT/FI1987/000003

(87)	International publication number:
	WO 1987/004300 (16.07.1987 Gazette 1987/15)

(84)	Designated Contracting States:
	AT BE CH DE FR GB LI NL SE

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Priority:

10.01.1986 FI 19860000120

(71)	Applicant: Valmet Oy
	SF-00130 Helsinki 13 (FI)

(72)	Inventors:
	TURUNEN, Markus SF-33270 Tampere (FI) KARAILA, Ilkka SF-33950 Pirkkala (FI)

(74)	Representative: Rostovanyi, Peter
	AWAPATENT AB, Box 5117 S-200 71 Malmö S-200 71 Malmö (SE)

(54)	PROCEDURE FOR MANUFACTURING A PIEZORESISTIVE RESISTANCE ELEMENT AND APPARATUS APPLYING SAID PROCEDURE, AND PICK-UP MANUFACTURED BY THE PROCEDURE, IN PARTICULAR A PRESSURE PICK-UP OR EQUIVALENT