(19)

(11)

EP 0 258 272 A1

(12)

(43) Date of publication: 09.03.1988 Bulletin 1988/10 (21) Application number: 87900484.0 (22) Date of filing: 05.12.1986

(51) International Patent Classification (IPC):  H01L 21/ 225( . ) (86) International application number: PCT/US1986/002626 (87) International publication number: WO 1987/004006 (02.07.1987 Gazette 1987/14)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 18.12.1985 US 19850811252 (71) Applicant: ALLIED CORPORATION Morristown New Jersey 07960 (US)	(72) Inventor: FATHIMULLA, Mohammed, Ayub Columbia, MD 21044 (US)