(19)

(11)

EP 0 261 145 A1

(12)

(43) Date of publication: 30.03.1988 Bulletin 1988/13 (21) Application number: 87901131.0 (22) Date of filing: 02.02.1987

(51) International Patent Classification (IPC):  H01L 21/ 677( . ) (86) International application number: PCT/NL1987/000003 (87) International publication number: WO 1987/004853 (13.08.1987 Gazette 1987/18)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 03.02.1986 NL 19860000255 18.02.1986 NL 19860000408 25.03.1986 NL 19860000762 15.04.1986 NL 19860000946 15.04.1986 NL 19860000947 02.05.1986 NL 19860001131 02.05.1986 NL 19860001132 16.05.1986 NL 19860001255 (71) Applicants: BOK, Edward NL-1171 DR Badhoevedorp (NL) BARLAG, Ronald J. W. NL-1104 MX Amsterdam (NL)	(72) Inventors: BOK, Edward NL-1171 DR Badhoevedorp (NL) BARLAG, Ronald J. W. NL-1104 MX Amsterdam (NL)