AN ETCH TECHNIQUE FOR METAL MASK DEFINITION - Patent 0261195

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EP 0 261 195 A1

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(43)	Date of publication:
	30.03.1988 Bulletin 1988/13

(21)	Application number: 87902125.0

(22)	Date of filing: 27.03.1987

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International Patent Classification (IPC):

G03F 1/ 08^{( . )}

G03F 7/ 09^{( . )}

(86)	International application number:
	PCT/GB1987/000210

(87)	International publication number:
	WO 1987/006027 (08.10.1987 Gazette 1987/22)

(84)	Designated Contracting States:
	DE FR NL

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Priority:

01.04.1986 GB 19860007950

(71)	Applicant: PLESSEY OVERSEAS LIMITED
	Ilford Essex IG1 4AQ (GB)

(72)	Inventor:
	BRAMBLEY, David, Robert Hardingstone Northampton NN4 0DD (GB)

(74)	Representative: Elliott, Frank Edward
	The Plessey Company plc. Intellectual Property Department Vicarage Lane Ilford, Essex IG1 4AQ Ilford, Essex IG1 4AQ (GB)

(54)	AN ETCH TECHNIQUE FOR METAL MASK DEFINITION