(19)

(11)

EP 0 261 208 A1

(12)

(43) Date of publication: 30.03.1988 Bulletin 1988/13 (21) Application number: 87902292.0 (22) Date of filing: 19.03.1987

(51) International Patent Classification (IPC):  G01D 5/ 14( . ) G01D 11/ 24( . ) G01N 21/ 77( . ) G01N 21/ 80( . ) G01N 27/ 30( . ) H01L 27/ 00( . ) H01L 29/ 78( . ) G01D 5/ 12( . ) G01N 21/ 17( . ) G01N 21/ 78( . ) G01N 27/ 00( . ) G01N 27/ 414( . ) H01L 27/ 14( . ) (86) International application number: PCT/US1987/000625 (87) International publication number: WO 1987/005747 (24.09.1987 Gazette 1987/21)

(84) Designated Contracting States: AT BE CH DE FR GB IT LI LU NL SE (30) Priority: 21.03.1986 US 19860842615 (71) Applicant: INTEGRATED IONICS, INC. Dayton New Jersey 08810 (US)	(72) Inventor: LAUKS, Imants, R. Morrisville, PA 19106 (US) (74) Representative: McCallum, William Potter  Cruikshank & Fairweather 19 Royal Exchange Square Glasgow G1 3AE Scotland Glasgow G1 3AE Scotland (GB)