(19)
(11) EP 0 263 146 A1

(12)

(43) Date of publication:
13.04.1988 Bulletin 1988/15

(21) Application number: 87902270.0

(22) Date of filing: 10.03.1987
(51) International Patent Classification (IPC): 
H01L 21/ 60( . )
(86) International application number:
PCT/US1987/000573
(87) International publication number:
WO 1987/005746 (24.09.1987 Gazette 1987/21)
(84) Designated Contracting States:
AT BE CH DE FR GB IT LI LU NL SE

(30) Priority: 19.03.1986 US 19860841282

(71) Applicant: Analog Devices, Inc.
Norwood Massachusetts 02062 (US)

(72) Inventors:
  • ROBERTS, Carl, M.
    Topsfield, MA 01983 (US)
  • SAXELBY, John, R., Jr.
    Maynard, MA 01754 (US)
  • MOSESON, Roger, M.
    Danvers, MA 01923 (US)

   


(54) ALUMINUM-BACKED WAFER AND CHIP